Preparation and characterization of p-type Sb2Te3 and n-type Bi2Te3 thin films grown by coevaporation
Preparation and characterization of p-type Sb2Te3 and n-type Bi2Te3 thin films grown by coevaporation
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DOI：
10.1116/1.1354600
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发表时间：
2001-05
期刊：
影响因子：
--
通讯作者：
H. Zou;D. Rowe;G. Min
中科院分区：
文献类型：
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作者：
H. Zou;D. Rowe;G. Min
通过共蒸发在玻璃衬底上沉积p型碲化锑薄膜和n型碲化铋薄膜。沉积的条件已被研究作为衬底温度（Ts），流量比（Fr=F（Te）/F（Sb，Bi））的函数，并优化，以实现高的热电功率因数。沉积薄膜的质量，例如结构、组成和形态，已通过X射线衍射、能量色散X射线分析、火焰原子吸收光谱和原子力显微镜进行了检查。薄膜的热电性能进行了评价，通过室温下测量的塞贝克系数，霍尔系数，和电阻率。结晶度和输运性质都受到非化学计量比的强烈影响，高化学计量比的样品表现出高结晶度和高热电功率因数。研究了p型Sb_2Te_3薄膜的Seebeck系数和电导率（αp，σp），并对它们的电学性质进行了讨论。
p-type antimony telluride thin films and n-type bismuth telluride thin films have been deposited by coevaporation on glass substrates. The conditions for deposition have been investigated as a function of substrate temperature (Ts), flux ratio (Fr=F(Te)/F(Sb, Bi)) and optimized to achieve a high thermoelectric power factor. The quality of deposited films, e.g. structure, composition and morphology, has been examined by x-ray diffraction, energy dispersive x-ray analysis, flame atomic absorption spectroscopy, and with an atomic force microscope. The thermoelectric properties of the thin films have been evaluated by room temperature measurement of the Seebeck coefficient, Hall coefficient, and electrical resistivity. Both the crystallinity and the transport properties are strongly affected by nonstoichiometry with the highly stoichiometric samples exhibiting a high crystallinity and high thermoelectric power factor. The Seebeck coefficient and electrical conductivity of p-type Sb2Te3 thin film (αp, σp) and ...