Surface acoustic wave ultraviolet detector based on zinc oxide nanowire sensing layer
Surface acoustic wave ultraviolet detector based on zinc oxide nanowire sensing layer
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DOI：
10.1016/j.sna.2012.06.017
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发表时间：
2012-09-01
影响因子：
4.6
通讯作者：
Ma, Ke
中科院分区：
文献类型：
--
作者：
Peng, Wenbo;He, Yongning;Ma, Ke
研制了一种基于氧化锌纳米线敏感层的声表面波紫外探测器。为了改善声表面波器件的响应特性，采用Morlet小波函数变迹的叉指换能器(IDT)和多个耦合器(MSC)。采用锌热蒸发法制备了氧化锌纳米线材料。采用转移法将氧化锌纳米线敏感层涂覆在声表面波器件的传播区，即传感区，并用磁控溅射方法将多晶氧化锌敏感层沉积在另一种器件上作为对比。研究发现，与溅射的氧化锌薄膜相比，氧化锌纳米线层本身具有更强的紫外光电响应特性，这是通过表征其光学和光电性质而获得的。在紫外光光源照射下，测量了两种紫外光探测器的中心频移。基于氧化锌纳米线层的紫外光探测器在150 mU W/cm(2)365 nm的光照下，多次开关周期的平均中心频移超过65 kHz，而另一种探测器的中心频移仅为8 kHz左右。实验结果表明，基于氧化锌纳米线层的声表面波紫外探测器具有良好的稳定性和重复性。这种高灵敏度的声表面波紫外光探测器具有实际应用的潜力。(C)2012爱思唯尔B.V.保留所有权利。
The surface acoustic wave (SAW) ultraviolet (UV) detector based on zinc oxide (ZnO) nanowire sensing layer was developed and fabricated in this paper. To improve the SAW device's response characteristics, inter-digital transducers (IDTs) apodized by Morlet wavelet function and multiple couplers (MSC) were applied. ZnO nanowire materials were synthesized by Zinc thermal evaporation method. The ZnO nanowire sensing layer was coated onto the propagating area of the SAW devices, namely the sensing area, by transfer method as well as the multi-crystal ZnO sensing layer was deposited onto another device by magnetron sputtering for comparison. It was found that ZnO nanowire layer itself shows enhanced UV photoelectric response characteristics compared to sputtered ZnO film layer, which is acquired by characterizing their optical and photoelectrical properties. Under illumination of a UV light source, central frequency shifts of the two UV detectors were measured. An average central frequency shift of over 65 kHz of the UV detector based on ZnO nanowire layer was observed under 150 mu W/cm(2) 365 nm illumination for several on-off cycles while the one of the other detector was only about 8 kHz. Moreover, the results indicate that the ZnO nanowire layer based SAW UV detector has good stability and repeatability. This kind of SAW UV detector with high sensitivity presents the potential for practical UV detection applications. (C) 2012 Elsevier B.V. All rights reserved.