Micromachines on the march
Micromachines on the march
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行军中的微型机械
作者：
J. Bryzek;K. Peterson;Wendell Mcculley
微型机电传感器和致动器可以像IC一样在硅片上大规模生产。它们联合收割机很容易与信号处理电路结合，成为测量、分析和控制环境的强大工具。作者描述了制造技术，表面活性，原子键，LIGA和SLIGA，掩埋和销毁。讨论了以下应用：压力传感器，医疗设备，工业/消费设备，航空电子和机械应用。<<ETX>>
Miniature electromechanical sensors and actuators can be mass produced on silicon wafers much like ICs. They combine readily with signal-processing circuitry into powerful tools that measure, analyze, and control their environments. The authors describe the fabrication techniques, surface activity, atomic bonds, LIGA and SLIGA, and bury and destroy. The following applications are discussed: pressure sensors, medical equipment, industrial/consumer equipment, avionics, and mechanical applications.<<ETX>>