Ferroelectric properties of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method below the Curie temperature
Ferroelectric properties of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method below the Curie temperature
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DOI：
10.1063/1.1762973
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发表时间：
2004-06
影响因子：
4
通讯作者：
T. Morita;Y. Wagatsuma;Yasuo Cho;H. Morioka;H. Funakubo;N. Setter
中科院分区：
文献类型：
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作者：
T. Morita;Y. Wagatsuma;Yasuo Cho;H. Morioka;H. Funakubo;N. Setter
水热法的沉积具有许多优点;低沉积温度、高纯度、在三维结构上沉积以及大厚度。研究了水热法制备锆钛酸铅（PZT）薄膜的工艺改进。有助于薄膜形态的关键参数被揭示为在沉积过程中的反应溶液的保持位置。除了这种改进之外，还证实了SrRuO 3底部电极能够在水热反应期间耐受高碱浓度。在150 °C下，24 h的水热合成时间在SrRuO 3/SrTiO 3（100）上产生厚度为500 nm的PZT膜。反极化2 Pr和矫顽电场分别为38.4 μC/cm ~ 2和21.8kV/cm。
Deposition of a hydrothermal method has a number of advantages; low deposition temperature, high-purity, deposition on a three-dimensional structure, and a large thickness. The present paper investigates the improvement of an epitaxial lead zirconate titanate (PZT) thin film deposited via hydrothermal synthesis. The critical parameter contributing to the film morphology was revealed to be the holding position of the reaction solution during deposition. In addition to this improvement, the SrRuO3 bottom electrode was confirmed to be able to withstand high alkali concentrations during the hydrothermal reaction. A hydrothermal synthesis time of 24 h yielded a PZT film with a thickness of 500 nm on SrRuO3/SrTiO3 (100) at 150 °C. The remanent polarization 2Pr and coercive electric field were 38.4 μC/cm2 and 21.8 kV/cm, respectively.