Integrated coaxial-hollow micro dielectric-barrier-discharges for a large-area plasma source operating at around atmospheric pressure
Integrated coaxial-hollow micro dielectric-barrier-discharges for a large-area plasma source operating at around atmospheric pressure
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DOI：
10.1088/0022-3727/38/3/012
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发表时间：
2005-02
期刊：
影响因子：
--
通讯作者：
O. Sakai;Y. Kishimoto;K. Tachibana
中科院分区：
文献类型：
--
作者：
O. Sakai;Y. Kishimoto;K. Tachibana
通过堆叠两个覆盖绝缘材料的金属网，研制了一种同轴空心微型介质阻挡放电集成结构。试验板的有效面积为50 mm直径，其中组装了数百个空心结构，单位空心面积为0.2 × 1.7 mm2。He或N2被用作放电气体，在20至100 kPa的压力范围内，并且即使在最大压力下，点火电压也小于2 kV。每个微放电的强度被观察到在整个压力范围内的整个区域是均匀的，并且其在一个放电脉冲期间的时间演化通过用门控CCD相机的二维显微观察进行了分析。在通过同轴空心结构的气体流动制度，观察到的放电特性的几个显着的变化，如杂质减少，降低放电电压和冷却的中性气体。在微放电的下游区域使用辅助平面电极设置远离网状电极平面使用单个探针测量基本等离子体参数。在He中观察到几毫米长的延长辉光的发生，但在N2中没有观察到。在100 kPa下，由氦中的探测数据导出的电子密度为103 × 1011 cm−3，表明在活跃微放电区域中的值大于1012 cm−3。
An integrated structure of coaxial-hollow micro dielectric-barrier-discharges has been developed by stacking two metal meshes covered with insulating material. The test panel has an effective area of 50 mm diameter in which hundreds of hollow structures are assembled with a unit hollow area of 0.2 × 1.7 mm2. He or N2 was used as the discharge gas in the pressure range from 20 to 100 kPa and the firing voltage was less than 2 kV, even at the maximum pressure. The intensity of each microdischarge was observed to be uniform over the whole area throughout the pressure range, and its time evolution during one discharge pulse was analysed through two-dimensional microscopic observation with a gated CCD camera. In a gas flow regime through the coaxial hollow structures, several significant changes of the discharge properties were observed, such as impurity reduction, decrease in discharge voltage and cooling of the neutral gas. The fundamental plasma parameters were measured using a single probe in the downstream region of microdischarges using an auxiliary flat electrode set apart from the mesh electrode plane. The occurrence of an extended glow with a length of some millimetres was observed in He but not in N2. The electron density derived by the probe data in He at 100 kPa was ∼3 × 1011 cm−3, suggesting a value of more than 1012 cm−3 in the active microdischarge region.