A study on resonant frequency and Q factor tunings for MEMS vibratory gyroscopes
A study on resonant frequency and Q factor tunings for MEMS vibratory gyroscopes
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DOI：
10.1088/0960-1317/14/11/014
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发表时间：
2004-11-01
影响因子：
2.3
通讯作者：
Chun, K
中科院分区：
文献类型：
--
作者：
Jeong, C;Seok, S;Chun, K
提出了一种提高MEMS振动陀螺性能的新方法。该方法提出了一种简单的方法，通过调整谐振频率和品质因数来提高性能，如过冲，建立时间和冲击免疫力。在两种模式（驱动和传感模式）的谐振频率和品质因数的差异被认为是决定陀螺仪的动态的关键因素。频率的差异可以通过电刚度容易地控制，但难以控制品质因数，因为它由真空水平和结构的形状决定。静电反馈技术允许的微陀螺仪的品质因数的控制。实验结果表明，当驱动模式和敏感模式之间的频率差为100 Hz时，敏感系统的等效品质因数从264调谐到100，陀螺频率响应中的谐振峰的幅度减小了58%。在这种情况下，时域估计的过冲减少了约50%，建立时间缩短了约三倍。由于没有直接测量陀螺瞬态响应的方法，时域估计是基于仿真的。
A new approach for improving the performance of MEMS vibratory gyroscopes was developed. The methodology suggests a simple way of improving the performance such as the overshoot, settling time and shock immunity by tuning the resonant frequency and the quality factor. The difference in the resonant frequency in two modes (driving and sensing mode) and the quality factors were found to be key factors in determining the dynamics of the gyroscopes. The difference in the frequency could be easily controlled by the electrical stiffness but it was difficult to control the quality factor because it is determined by vacuum level and the shape of structure. An electrostatic feedback technique allowed the control of the quality factor of the micro-gyroscopes. The experimental results show that the magnitude of the resonant peak in the frequency response of the gyroscope is reduced by 58% when the equivalent quality factor of the sensing system is tuned from 264 to 100 at a 100 Hz frequency difference between the driving and sensing modes. The time domain estimation was an approximate 50% reduction in the overshoot and an approximate threefold shortening of the settling time in that case. The estimation in the time domain was based on the simulation because there is no method to measure the transient response of gyroscopes directly.