Quantitative traceable temperature measurement using novel thermal imaging camera
Quantitative traceable temperature measurement using novel thermal imaging camera
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DOI：
10.1364/oe.26.024904
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发表时间：
2018-09-17
期刊：
影响因子：
3.8
通讯作者：
Willmott, Jon R.
中科院分区：
文献类型：
--
作者：
Hobbs, Matthew J.;Zhu, Chengxi;Willmott, Jon R.
基于焦平面阵列（FPA）传感器的传统热成像相机存在固有问题：例如杂散辐射、串扰以及确保每个像素表现得像相同温度传感器的校准不确定性。辐射温度计可以在很大程度上克服这些问题，它只包含一个可以优化和校准的探测器元件。虽然后一种方法可以为单点温度测量提供出色的精度，但它不能提供目标对象的温度图像。在这项工作中，我们提出了一个微机械系统（MEMS）镜和硅（Si）雪崩光电二极管（APD）为基础的单像素相机，能够产生定量的热图像在1 μ m的工作波长。这项工作利用定制设计的f-theta广角透镜和MEMS反射镜，在x和y维度上扫描+/-30度，而不会由于视场（FOV）中任何点处的渐晕而导致信号损失。我们的单像素相机表现良好，具有3摄氏度的源尺寸效应（SSE）相关温度误差，可以测量低于700摄氏度，同时实现+/- 0.5摄氏度的噪声相关测量不确定性。我们的测量值经过校准，并可追溯到1990年国际温标（ITS-90）。低SSE和不存在渐晕的组合使得能够在空间场上进行定量温度测量，其中测量不确定性的水平低于基于FPA的热成像相机可能的水平。由The Optical Society根据Creative Commons Attribution 4.0 License条款发布。
Conventional thermal imaging cameras, based on focal-plane array (FPA) sensors, exhibit inherent problems: such as stray radiation, cross-talk and the calibration uncertainty of ensuring each pixel behaves as if it were an identical temperature sensor. Radiation thermometers can largely overcome these issues, comprising of only a single detector element that can be optimised and calibrated. Although the latter approach can provide excellent accuracy for single-point temperature measurement, it does not provide a temperature image of the target object. In this work, we present a micromechanical systems (MEMS) mirror and silicon (Si) avalanche photodiode (APD) based single-pixel camera, capable of producing quantitative thermal images at an operating wavelength of 1 mu m. This work utilises a custom designed f-theta wide-angle lens and MEMS mirror, to scan +/- 30 degrees in both x- and y-dimensions, without signal loss due to vignetting at any point in the field of view (FOV). Our single-pixel camera is shown to perform well, with 3 degrees C size-of-source effect (SSE) related temperature error and can measure below 700 degrees C whilst achieving +/- 0.5 degrees C noise related measurement uncertainty. Our measurements were calibrated and traceable to the International Temperature Scale of 1990 (ITS-90). The combination of low SSE and absence of vignetting enables quantitative temperature measurements over a spatial field with measurement uncertainty at levels lower than would be possible with FPA based thermal imaging cameras. Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License.