Evaluation of micro-replication technology using silicone rubber molds and its applications
Evaluation of micro-replication technology using silicone rubber molds and its applications
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DOI：
10.1016/s0890-6955(03)00164-0
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发表时间：
2003-10-01
影响因子：
14
通讯作者：
Dornfeld, DA
中科院分区：
文献类型：
--
作者：
Chung, S;Im, Y;Dornfeld, DA
微复制技术（MRT）起源于半导体工艺，并已广泛应用于传感器、微流体和显示器等其他行业。然而，近年来，由于成本高昂和材料限制，MRT 的推广进展缓慢。因此，本文介绍了一种使用硅橡胶模具进行MRT的新工艺。在此过程中，硅橡胶模具将母模转移到形状相同但材料不同的最终产品上。为了验证硅橡胶模具应用于MRT的可能性，评估了其可转移性，然后将其应用于PDP障肋的制造。 (C) 2003 Elsevier Ltd. 保留所有权利。
Micro-replication technology (MRT) originated in semiconductor processes and has been widely utilized in other industries such as sensors, micro-fluidics and displays. Recently, however, MRT has been slow in spreading due to its high cost and material limitations. Therefore, a new process in this paper, for MRT using silicone rubber molds is introduced. In this process, a silicone rubber mold transfers a master pattern to the final product with the same shape but different material. In order to verify the possibility of applying silicone rubber molds to MRT, its transferability was evaluated, and then was applied to the fabrication of PDP barrier ribs. (C) 2003 Elsevier Ltd. All rights reserved.