S.Wickramanayaka: "Remote Plasma SiO_2 Deposition by Tetraethoxysilane with Chemically and Energetically Different Atomic Species" Japanese Journal Applied Physics. 33-A. 3520-3527 (1994)
S.Wickramanayaka: "Remote Plasma SiO_2 Deposition by Tetraethoxysilane with Chemically and Energetically Different Atomic Species" Japanese Journal Applied Physics. 33-A. 3520-3527 (1994)
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S.Wickramanayaka:“通过具有化学和能量不同原子种类的四乙氧基硅烷进行远程等离子体 SiO_2 沉积”日本应用物理学杂志。
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