Improvement of C-Axis parallel orientation of ZnO film on silica glass pipes with various diameters for SH-SAW pipe sensor
Improvement of C-Axis parallel orientation of ZnO film on silica glass pipes with various diameters for SH-SAW pipe sensor
复制标题
SH-SAW管道传感器中不同直径石英玻璃管上ZnO薄膜C轴平行取向的改进
DOI：
10.1109/ultsym.2019.8925796
复制
发表时间：
2019
期刊：
影响因子：
--
通讯作者：
and T. Yanagitani
中科院分区：
文献类型：
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作者：
T. Wakabayashi;S. Takayanagi;Y. Takamura;M. Matsukawa;and T. Yanagitani
剪切水平表面声波 (SH-SAW) 传感器已被研究用于测量液体特性。 SH-SAW 的长距离传播和管道表面多次波往返提高了测量灵敏度。 c 轴平行取向 ZnO 薄膜可以激发 SH-SAW 并通过溅射沉积在弯曲表面上生长。在本研究中，展示了不同管径的管道表面上的 ZnO 薄膜生长情况。仅在面向溅射靶面的管材表面获得了高取向的c轴平行取向ZnO薄膜。限制沉积区域的狭缝和管道的自动旋转系统对于整个管道表面上均匀的薄膜生长是有效的。这种薄膜/管基板结构是高灵敏度 SHSAW 传感器的良好候选者。
Shear horizontal surface acoustic wave (SH-SAW) sensors have been studied for measurements of liquid properties. The long-distance propagation of SH-SAW with multiple wave roundtrips on a pipe surface improve the measurement sensitivity. c-Axis parallel oriented ZnO films can excite the SH-SAW and be grown on a curved surface by a sputtering deposition. In this study, the ZnO film growths on pipe surfaces with various pipe diameters were demonstrated. The c-axis parallel oriented ZnO film with high orientation was only obtained on the pipe surface facing the sputtering target plane. A slit which limits the deposition area and an automatic rotation system of the pipe were effective for the uniform film growth on the entire pipe surface. This film/pipe substrate structure is a good candidate for the SHSAW sensor with high sensitivity.