A piezoelectric microvalve for cryogenic applications
A piezoelectric microvalve for cryogenic applications
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DOI：
10.1088/0960-1317/18/1/015023
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发表时间：
2008-01-01
影响因子：
2.3
通讯作者：
Gianchandani, Yogesh B.
中科院分区：
文献类型：
--
作者：
Park, Jong M.;Taylor, Ryan P.;Gianchandani, Yogesh B.
本文报道了一种用于低温大流量调节的常开压电驱动微阀。一种设想的应用是控制冷冻剂的流动，用于具有高度温度稳定性和小的热梯度的分布式冷却。该阀由一个由绝缘体上硅晶片、玻璃晶片、市售压电叠层致动器和Macor（TM）陶瓷封装制成的微加工模具组成，其整体尺寸为1 x 1 x 1 cm（3）。一个周边扩大计划的阀座已经实施，以提供高流量调制。在室温下进行的测试中，将流量从阀门完全打开（0 V）时的980 mL min（-1）调节至60 V驱动电压时的0 mL min（-1），入口表压为55 kPa。该范围比类似尺寸的压电微型阀的调制能力高几个数量级的流量。在80 K的低温下，该阀成功地将气体流量从350 mL min（-1）调节到20 mL min（-1），入口压力比大气压高104 kPa。该阀的操作也已在高达380 K的高温下得到验证。该阀的响应时间小于1 ms，工作带宽高达820 kHz。
This paper reports on a normally open piezoelectrically actuated microvalve for high flow modulation at cryogenic temperatures. One application envisioned is to control the flow of a cryogen for distributed cooling with a high degree of temperature stability and a small thermal gradient. The valve consists of a micromachined die fabricated from a silicon-on-insulator wafer, a glass wafer, a commercially available piezoelectric stack actuator and Macor (TM) ceramic encapsulation that has overall dimensions of 1 x 1 x 1 cm(3). A perimeter augmentation scheme for the valve seat has been implemented to provide high flow modulation. In tests performed at room temperature the flow was modulated from 980 mL min(-1) with the valve fully open (0V), to 0 mL min(-1) with a 60 V actuation voltage, at an inlet gauge pressure of 55 kPa. This range is orders of magnitude higher flow than the modulation capability of similarly sized piezoelectric microvalves. At the cryogenic temperature of 80 K, the valve successfully modulated gas flow from 350 mL min(-1) down to 20 mL min(-1) with an inlet pressure of 104 kPa higher than the atmosphere. The operation of this valve has been validated at elevated temperatures as well, up to 380 K. The valve has a response time of less than 1 ms and has operational bandwidth up to 820 kHz.