Deposition and characterization of phase-pure Ti 2 AlC and Ti 3 AlC 2 coatings by DC magnetron sputtering with cost-effective targets
Deposition and characterization of phase-pure Ti 2 AlC and Ti 3 AlC 2 coatings by DC magnetron sputtering with cost-effective targets
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DOI：
10.1016/j.vacuum.2018.04.001
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发表时间：
2018-07
期刊：
影响因子：
4
通讯作者：
Yueming Li;Guorui Zhao;Y. Qian;Jingjun Xu;Mei-shuan Li
中科院分区：
文献类型：
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作者：
Yueming Li;Guorui Zhao;Y. Qian;Jingjun Xu;Mei-shuan Li
