Additive Manufacturing of Metal Micro-ring and Tube by Laser-Assisted Electrophoretic Deposition with Laguerre Gaussian Beam
Additive Manufacturing of Metal Micro-ring and Tube by Laser-Assisted Electrophoretic Deposition with Laguerre Gaussian Beam
复制标题
拉盖尔高斯光束激光辅助电泳沉积增材制造金属微环和管
DOI：
10.1007/s41871-020-00087-y
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发表时间：
2021
影响因子：
--
通讯作者：
F. Iwata
中科院分区：
文献类型：
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作者：
K. Nakazawa;S. Ozawa;F. Iwata
我们报告了一种激光辅助电泳沉积的方法，使用拉盖尔-高斯光束进行金属环和管的无掩模图案。这些是极其重要的结构，特别是在光子器件中。金属纳米粒子通过激光捕获技术聚集在胶体溶液中，通过电泳沉积在衬底上。在激光捕获过程中，沉积模式取决于聚焦光斑的形状。拉盖尔-高斯光束的强度分布呈环形。通过改变拉盖尔-高斯光束的拓扑电荷，可以制备出不同内径的环。拓扑电荷为1、3和5的环的等效内径分别为0.30、0.78和1.45µm。该沉积环的内径小于激光波长（532 nm），其拓扑电荷为1。通过沉积电池的垂直位移，制备了拓扑电荷为3的管。利用拉盖尔-高斯光束开发的沉积技术将有助于光子和纳米流体器件制造的进步。
We report a method for laser-assisted electrophoretic deposition using a Laguerre–Gaussian beam for maskless patterning of metal rings and tubes. These are structures of utmost importance, particularly in photonic devices. Metal nanoparticles, which are gathered in a colloidal solution by a laser trapping technique, are deposited on a substrate via electrophoresis. The deposition pattern is dependent on the focused spot shape during laser trapping. The intensity distribution of the Laguerre–Gaussian beam is ring-shaped. Rings with different inner diameters can be fabricated by varying the topological charge of the Laguerre–Gaussian beam. The equivalent inner diameters of the deposited rings with topological charges of 1, 3, and 5 were 0.30, 0.78, and 1.45 µm, respectively. The inner diameter of the deposited ring with a topological charge of 1 was smaller than the wavelength of the laser beam (532 nm). A tube was also fabricated with a topological charge of 3 by vertical displacement of the deposition cell. The deposition technology developed here using Laguerre–Gaussian beam will contribute to advancements in the fabrication of photonic and nano-fluidic devices.