Simultaneous measurement of acoustic pressure and temperature using a Fabry-Perot interferometric fiber-optic cantilever sensor
Simultaneous measurement of acoustic pressure and temperature using a Fabry-Perot interferometric fiber-optic cantilever sensor
复制标题
使用法布里-珀罗干涉光纤悬臂梁传感器同时测量声压和温度
DOI：
10.1364/oe.387195
复制
发表时间：
2020-05-11
期刊：
影响因子：
3.8
通讯作者：
Yu, Qingxu
中科院分区：
文献类型：
--
作者：
Chen, Ke;Yang, Beilei;Yu, Qingxu
提出了一种用于声压和温度同时测量的法布里-珀罗（F-P）干涉型光纤悬臂梁传感器。声压波推动悬臂梁产生周期性偏转，而温度使传感器变形并引起F-P腔长缓慢变化。采用光谱解调法快速计算了光纤悬臂梁传感器的F-P腔绝对长度。声压和温度分别通过高通滤波和平均连续测量的绝对腔长值获得。实验结果表明，在1 kHz频率下，该传感器可以获得198.3nm/Pa的超高灵敏度。此外，温度的增加降低了声学响应的谐振频率，并增加了静态F-P腔长度。谐振频率偏移的温度系数和传感器的温度响应分别为-0.49 Hz/℃和83 nm/℃。通过温度补偿，声压测量误差达到± 3%。提出的双参数测量方案大大简化了系统结构，降低了系统成本。(C)根据OSA开放获取出版协议的条款，2020年美国光学学会
A Fabry-Perot (F-P) interferometric fiber-optic cantilever sensor is presented for simultaneous measurement of acoustic pressure and temperature, which are demodulated by a single high-speed spectrometer. The acoustic pressure wave pushes the cantilever to produce periodic deflection, while the temperature deforms the sensor and causes the F-P cavity length to change slowly. The absolute length of the F-P cavity of the fiber-optic cantilever sensor is calculated rapidly by using a spectral demodulation method. The acoustic pressure and temperature are obtained by high-pass filtering and averaging the continuously measured absolute cavity length value, respectively. The experimental results show that the acoustic pressure can be detected with an ultra-high sensitivity of 198.3 nm/Pa at 1 kHz. In addition, an increase in temperature reduces the resonant frequency of the acoustic response and increases the static F-P cavity length. The temperature coefficient of the resonance frequency shift and the temperature response of the sensor are -0.49 Hz/degrees C and 83 nm/degrees C, respectively. Furthermore, through temperature compensation, the measurement error of acoustic pressure reaches +/- 3%. The proposed dual parameter measurement scheme greatly simplifies the system structure and reduces the system cost. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement