Micro electrostrictive actuator with metal compliant electrodes for flow control applications

Micro electrostrictive actuator with metal compliant electrodes for flow control applications
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具有金属柔顺电极的微电致伸缩执行器,适用于流量控制应用

DOI:
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发表时间:
2004
期刊:
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest
影响因子:
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通讯作者:
N. Kasagi
N. Kasagi
中科院分区:
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文献类型:
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作者:
A. Pimpin;Yuji Suzuki;N. Kasagi

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研制了一种电致伸缩薄膜驱动的微型合成射流驱动器。为了获得较大的离面变形,采用了金属同心环电极。结果表明,环形电极的差距/宽度比对变形有很大的影响。直径为2 mm的致动器的最大变形为30 /spl mu/m,这是普通金属电极致动器的3倍。利用该电致伸缩致动器制作了合成射流致动器样机,并对0.5mm孔径的射流进行了可视化。
A micro synthetic jet actuator driven by electrostrictive diaphragm actuator was developed for flow control applications. Metal concentric ring electrodes were employed in order to obtain large out-of-plane deformation. It is found that the deformation strongly depends on the gap/width ratio of the ring electrode. The maximum deformation for 2 mm-diameter actuators is as large as 30 /spl mu/m, which is 3 times larger than that of the plain metal electrode actuator. A prototype synthetic jet actuator was fabricated by using the present electrostrictive actuator, and the jet flow issued from a 0.5 mm orifice was visualized.