Long length coated conductor fabrication by inclined substrate deposition and evaporation
Long length coated conductor fabrication by inclined substrate deposition and evaporation
复制标题
通过倾斜基底沉积和蒸发制造长长度涂层导体
DOI：
10.1088/1742-6596/43/1/054
复制
发表时间：
2006
期刊：
影响因子：
--
通讯作者：
H. Kinder
中科院分区：
文献类型：
--
作者：
W. Prusseit;C. Hoffmann;R. Nemetschek;G. Sigl;J. Handke;A. Lümkemann;H. Kinder
涂覆导线的商业化发展很快。因此，我们提出了一条从最初的基片制备到最终的金属涂层生产第二代高温超导带材的经济路线。最重要和最具技术挑战性的步骤是以卷轴到卷轴的配置沉积定向缓冲层和超导薄膜。已经开发了新的蒸发技术以实现可靠的、高速率的带材涂覆。通过倾斜衬底沉积(ISD)和简单的电子枪蒸发沉积DyBCO实现了高度取向的MgO缓冲层，产生了超过200A/cm的临界电流。涂覆导线的制造长度可达40米，目前已在各种应用中进行了测试。
The commercial development of coated conductors is rapidly progressing. As a result we present an economic route to produce second generation HTS tape from the initial substrate preparation to the final metal coating. The most important and technically challenging steps are the deposition of an oriented buffer layer and the superconductor film in a reel-to-reel configuration. New evaporation techniques have been developed to enable reliable, high rate tape coating. Highly oriented MgO - buffer layers are realized by inclined substrate deposition (ISD) and DyBCO is deposited by simple e-gun evaporation yielding critical currents beyond 200 A/cm. Coated conductors have been fabricated up to 40 m length and are currently tested in a variety of applications.