A two-dimensional waveguide beam for X-ray nanodiffraction

A two-dimensional waveguide beam for X-ray nanodiffraction
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DOI:
10.1107/s0021889811049132
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发表时间:
2012-02-01
影响因子:
6.1
通讯作者:
Mueller, Martin
Mueller, Martin
中科院分区:
材料科学3区
文献类型:
--
作者:
Krywka, Christina;Neubauer, Henrike;Mueller, Martin

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PETRA III的微纳焦点X射线散射(MINAXS)光束线配备了两个连续排列的终端站,最后一个是纳焦点终端站。实验设备首次束内调试于2010年底成功进行,采用截面为50 nm x 50 μm至50 nm x 2 μm的二维约束硬X射线硅波导产生纳米束。对波导产生的光束进行了全面的表征,给出了光束几何形状、波导的传输效率和绝对通量的值。除了这些结果之外,本文还详细介绍了该设置。在纳米晶 TiN 硬质涂层上进行了首次高分辨率纳米衍射实验,以验证纳米衍射装置的分辨率并揭示喷砂 TiN 涂层上的局部梯度。总之,主要关注的是纳米光束的可用性、它是如何产生的以及二维限制波导中的光束首次用于衍射实验这一事实。
The micro- and nanofocus X-ray scattering (MINAXS) beamline of PETRA III is equipped with two consecutively arranged endstations, the last of which is the nanofocus endstation. The first in-beam commissioning of the experimental equipment was successfully performed at the end of 2010, using two-dimensionally confining hard X-ray silicon waveguides with cross sections of 50 nm x 50 mu m to 50 nm x 2 mu m for nanobeam generation. A full characterization of the waveguide-generated beams was performed, giving values for the beam geometries, the transmission efficiencies of the waveguides and absolute fluxes. Along with these results a detailed description of the setup is presented in this paper. A first high-resolution nanodiffraction experiment on a nanocrystalline TiN hard coating was performed to verify the resolution of the nanodiffraction setup and to reveal the local gradients across the blasted TiN coating. In conclusion, the main concern is the availability of the nanobeam, how it was generated and the fact that a beam out of a two-dimensionally confining waveguide was used for diffraction experiments for the first time.