MEMS-based ultrasonic transducer as the receiver for wireless power supply of the implantable microdevices
MEMS-based ultrasonic transducer as the receiver for wireless power supply of the implantable microdevices
复制标题
基于MEMS的超声波换能器作为植入式微型设备无线供电接收器
DOI：
10.1016/j.sna.2014.07.008
复制
发表时间：
2014-11-01
影响因子：
4.6
通讯作者：
Yang, Chunsheng
中科院分区：
文献类型：
--
作者：
He, Qing;Liu, Jingquan;Yang, Chunsheng
本文研究了一种基于mems超声换能器的可植入设备无线电源。换能器采用了通过粘接和减薄技术制备的压电厚膜。连续的40.43千赫的超声波在两种介质中传播：水和生物组织。该发射功率由MEMS换能器接收，在水箱中，当接收距离为20 mm时，声能密度为3.7 x 10(-9) J/cm(3)时，峰值功率传输为35 μ W；在猪后腿组织中，当接收距离为22 mm时，声能密度为1.25 x 10(-8) J/cm(3)时，峰值功率传输为49 μ W。该器件在40.43 kHz频率下的压力灵敏度约为0.296 mV/Pa。在递进场中，在589.3 μ W/cm(2)和1.2 mW/cm(2)的强度下，能量密度分别为3.7 x 10(-9) J/cm(3)和1.25 x 10(-8) J/cm(3)，均低于FDA的安全限值。在实验的基础上，详细讨论了不同接收角度下器件在不对准情况下的输出功率。(C) 2014 Elsevier B.V.版权所有
This paper investigates a wireless power supply for implantable devices with a MEMS-based ultrasonic transducer. The transducer employs a piezoelectric thick film prepared by bonding and thinning technologies. A continuous ultrasound wave of 40.43 kHz is transmitted in two media: water and biological tissue. This transmitted power is received by a MEMS transducer, demonstrating a peak power transfer of 35 mu W under the sound energy density of 3.7 x 10(-9) J/cm(3) at a reception distance of 20 mm in a water tank, and a peak power of 49 p,W under the sound energy density of 1.25 x 10(-8) J/cm(3) at a reception distance of 22 mm in a pig hind leg tissue. The pressure sensitivity of this device is about 0.296 mV/Pa in the frequency of 40.43 kHz. In a progressive field, the energy density of 3.7 x 10(-9) J/cm(3) and 1.25 x 10(-8) J/cm(3) would be achieved at the intensity of 589.3 mu W/cm(2) and 1.2 mW/cm(2), which are both below the FDA safety limit. The output power of the device under situations of misalignment at various reception angles is also discussed in detail based on experimental results. (C) 2014 Elsevier B.V. All rights reserved.