Development of Quantitative Laser Ionization Mass Spectrometry (LIMS)

奥多姆博士和他在查尔斯·埃文斯联合公司的同事们 最近完成了第一阶段研究，以评估 激光质谱法提供定量和定性 电介质薄膜的元素和分子微量分析。 II期研究中的研究将涉及准备和 薄膜标准的表征， 离子检测系统的线性动态范围和定性 定量分析研究。 技术，如果 成功，将对制造产生重大影响， 薄膜器件的表征。

Dr. Odom and his colleagues at Charles Evans and Associates recently completed a Phase I study to evaluate the feasibility of laser mass spectrometry providing quantitative and qualitative elemental and molecular microanalysis of thin dielectric films. The research in the Phase II study will involve preparation and characterization of thin film standards, enhancement of the linear dynamic range of the ion detection system and qualitative and quantitative analytical investigations. The technique, if successful, will have a major impact on the fabrication and characterization of thin film devices.