Acquisition of Rutherford Backscattering Analysis System

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Rutherford Backscattering Spectrometry (RBS) in particular has evolved into major analytical technique for thin film and complements that available from existing instrumentation which emphasizes either bulk characterization or surface analysis. RBS offers good elemental specificity. The compositional information is quantitative and the analysis is nondestructive. The research projects using the instrumentation are quite diverse, and indication of the growing interest in this technique within the materials science community. The major users of the equipment emphasize areas related to thin films, semiconductor materials and interfacial structures. Auxiliary users utilize RBS to characterize the materials and reactions involved in corrosion and segregation processes, in semiconductor technology and in plasma fusion applications. Substantial support from the university and industrial sources will contribute to the purchase of the RBS system.