Development and Testing of an Advanced Electron Optical System for Photoelectron Microscopes and Other High Resolution Imaging Systems

用于光电子显微镜和其他高分辨率成像系统的先进电子光学系统的开发和测试

• 批准号: 8907619
• 负责人: O. Griffith
• 金额: $ 70.59万
• 依托单位: University of Oregon Eugene
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1989
• 资助国家: 美国
• 起止时间: 1989-07-01 至 1995-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8907619&HistoricalAwards=false
• 关键词: Development; Testing; Advanced; Electron; Optical

This grant application seeks funds to carry out the second phase of a joint project between Portland State University and the University of Oregon on the development of a photoelectron microscope (PEM) of advanced design and higher resolution (theoretically 1 nm to 2 nm, as compared with the present 10 nm). The project will achieve this resolution by incorporating an electron mirror to correct for chromatic and spherical aberrations. The first phase of this project was funded by a private foundation in the Northwest (the M. J. Murdock Chawitable Trust). The first phase covered the design and construction of an electron mirror and the electron lenses and other components used in studying the mirror, and theoretical and experimental investigations of the mirror properties. The second phase, planned for three years, focuses on further research on aberration correction, on mirror design, deflector design, and on instrument design and construction. Specific goals include a detailed study of the aberration correcting properties of the mirror in combination with the electron optical components of the photoelectron microscope in a vacuum optical bench, and the design and construction of an experimental test column in which the resolution of the corrected electron optical system can be evaluated. The successful demonstration of a corrected system would represent an advanced in the field of electron optics. The correction method would also be applicable to a range of other instruments which require aberration correction and improved resolution (e.g., electron or ion probes and advanced photoelectron microscope, when completed, will be valuable in studies of organic and biological specimens, semiconductors, and other surface studies where high resolution and low specimen damage are important.

这项赠款申请寻求资金进行第二阶段 波特兰州立大学和 俄勒冈州大学关于光电子的发展 先进的设计和更高的分辨率显微镜（PEM） （理论上为1 nm至2 nm，而目前为10 nm）。 该项目将通过纳入一个 电子镜校正色差和球面 畸变 该项目的第一阶段由一个 西北地区的私人基金会（M。J·默多克·肖韦塔布尔 信任）。 第一阶段包括设计和建造 电子镜和电子透镜等部件 用于研究镜子，理论和实验 镜子属性的研究。 第二阶段， 计划三年，重点是进一步研究 像差校正、反射镜设计、偏转器设计以及 仪器设计和建造。 具体目标包括： 详细地研究了该材料的像差校正特性， 反射镜与电子光学组件的组合 光电子显微镜在真空光学工作台，和 设计和建造了一个实验测试柱， 校正后的电子光学系统的分辨率可以 评估。 一个修正系统的成功演示 将代表电子光学领域的一个进步。 的 校正方法也适用于一系列其他 需要像差校正和改进的仪器 分辨率（例如，电子或离子探针和先进的 光电子显微镜，完成后，将是有价值的， 研究有机和生物标本，半导体， 其他表面研究，其中高分辨率和低样本 伤害很重要。