Plasma and Microwave Physics of ECR Sources

ECR 源的等离子体和微波物理

• 批准号: 8912756
• 负责人: Michael Mauel
• 金额: $ 19.37万
• 依托单位: Columbia University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1990
• 资助国家: 美国
• 起止时间: 1990-04-01 至 1994-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8912756&HistoricalAwards=false
• 关键词: Plasma; Microwave; Physics; ECR; Sources

This new research effort is to experimentally and theoretically investigate the physics of plasmas created by electron cyclotron resonance (ECR) microwave plasma sources. The results of this research will expand understanding of microwave generated plasmas and may enable the design of improved sources to be used for anisotropic, plasma reactive-ion etching or other types of plasma processing of surfaces. The project is divided into three stages. In the first stage, very detailed laboratory measurements will be made of a relatively small cavity ECR source with simple cylindrical boundary conditions. A three-axis, computer- controlled probe diagnostic will be used to generate three-dimensional images of the applied electromagnetic field within the plasma, the plasma density and Langmuir probe characteristics, and the plasma particle and energy effluent. In the second stage, a precise model of the interaction between the microwave fields and the plasma will be developed and then implemented numerically enabling a one- to-one comparison between measurements and experiment. The objective of the microwave-plasma model is to develop a steady-state and ultimately self- consistent description of (1) microwave propagation and absorption through the source cavity, and (2) plasma particle and power balance along a magnetic field-line. Finally, in the third stage, a modified ECR source cavity will be designed in collaboration with IBM in order to optimize particular plasma parameters of mutual interest. This new source cavity will be constructed and tested using the three- axis probe diagnostic, thereby, evaluating the success of the model as a design tool. Funds for the theoretical modeling portion of this project are being provided by IBM.

这项新的研究工作是实验性的， 从理论上研究等离子体物理 电子回旋共振（ECR） 微波等离子体源 的结果 研究将扩大对微波的理解 产生等离子体并可以实现设计 用于各向异性等离子体的改进源 反应离子蚀刻或其它类型的等离子体 表面处理。 该项目分为 三个阶段。 在第一阶段，非常详细 实验室测量将由一个相对 简单圆柱形小腔ECR源 边界条件 一台三轴电脑 受控探头诊断将用于生成 应用的三维图像 等离子体中的电磁场等离子体 密度和朗缪尔探针特性，以及 等离子体粒子和能量流出物。 在第二 阶段，一个精确的模型之间的相互作用， 微波场和等离子体将被开发 然后在数字上实现， 测量值之间的一对一比较， 实验 微波等离子体的目标 模型是发展一个稳定的状态，并最终自我， （1）微波传播的一致性描述 和通过源腔的吸收，以及（2） 等离子体粒子和功率平衡沿着磁 场线 最后，在第三阶段，修改的ECR 源腔将与 IBM为了优化特定的等离子体 共同利益的参数。 这个新的来源 将使用三种方法构建和测试空腔- 轴探头诊断，从而评估成功 作为一种设计工具。 资金 该项目的理论建模部分正在 由IBM提供。