Strategic Manufacturing Initiative: Research in Ultra Precision Machining

战略制造计划：超精密加工研究

• 批准号: 8914232
• 负责人: Daniel DeBra
• 金额: $ 66.55万
• 依托单位: Stanford University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1990
• 资助国家: 美国
• 起止时间: 1990-08-01 至 1994-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8914232&HistoricalAwards=false
• 关键词: Strategic; Manufacturing; Initiative; Research; Ultra

This multi-disciplinary research is directed at developing ultra precision machining techniques. Three main tasks are postulated: (1) the development of new and novel optical methods to improve metrology based on Global Positioning System satellite processing techniques, (2) the development of laminar flow hydraulic devices which provide smooth vibration-free actuation and spindle drive with improved machine temperature control, and (3) implementation of the computational technology and approach of artificial intelligence to automate some of the modeling procedures required to attain the ultimate in precision from a given machine. The knowledge gained from these three tasks will be combined in the building of a modest scale but realistic diamond turning machine to advance the technology of precision machining especially as it applies to the fabrication of optics for short wave form lithography.

这项多学科的研究旨在发展超精密加工技术。假定有三个主要任务：(1)发展基于全球定位系统卫星处理技术的新型光学方法来改进计量；(2)发展层流液压装置，提供平滑无振动的驱动和改进机床温度控制的主轴驱动；(3)实现人工智能的计算技术和方法，使某些建模过程自动化，以达到给定机器的最终精度。从这三个任务中获得的知识将结合在一个中等规模但现实的金刚石车床的建造中，以推进精密加工技术，特别是当它应用于短波光刻光学制造时。