Research Opportunities for Women: Characterizavion of a Research RF Parallel Plate Reactor

女性的研究机会：研究型射频平行板反应器的表征

• 批准号: 9009899
• 负责人: Mary Brake
• 金额: $ 5.9万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1990
• 资助国家: 美国
• 起止时间: 1990-06-01 至 1992-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9009899&HistoricalAwards=false
• 关键词: Research; Opportunities; Women; Characterizavion; RF

Plasmas have become important in materials processing because they can provide a highly chemically reactive environment while remaining at relatively low overall gas temperatures. One of the more common industrial reactors consists of radio frequency (RF) power capacitively coupled to two parallel plate electrodes. The material to be processed is placed on one of the electrodes and the plasma generated in the fill gas provides the free radicals, ions and energetic neutrals needed for the particular chemical process. With this Career Advancement Award, the PI will design and construct a "standard" RF reference parallel plate reactor with maximum capability for diagnostics as well as certain characteristics desirable for modeling. Specifically, the reactor will have the following properties - RF power (capacitively coupled) 0 - 500 Watts - RF Frequency 13.56 MHz - Electrode Spacing 2.54 cm - argon 99.999% - Gas flow 2 - 20 sccm - Gas pressure 0.1 -1.0 Torr The diagnostics she plans to measure include: (1) the first five harmonics, magnitude and phase of the voltage and current at both electrodes, (2) spatial and temporal measurements of the visible optical emission, (3) spatial measurements of eletron temperature and density, and (4) spatial measurements of the electron energy distribution function. The results of these measurements will be compared to measurements taken on another reactor on the University of Michigan campus. Once the standard reactor is fully characterized, it will be used as for comparison in the modeling and experimental study and analysis of industrial reactors. The grant will advance the career of the PI by providing her initial experience in a new line of research on which future projects can be based.

等离子体在材料加工中变得非常重要，因为它们可以提供高度化学反应的环境，同时保持相对较低的整体气体温度。一种较为常见的工业反应器由射频（RF）功率电容耦合到两个平行板电极组成。待处理的材料被放置在其中一个电极上，在填充气体中产生的等离子体提供特定化学过程所需的自由基、离子和高能中性物质。有了这个职业发展奖，PI将设计和建造一个“标准”射频参考平行板反应器，具有最大的诊断能力以及建模所需的某些特性。具体地说,该反应器将具有以下特性-射频功率（电容耦合）0 - 500瓦-射频频率13.56 MHz -电极间距2.54厘米-氩气99.999% -气体流量2 - 20 sccm-气体压力0.1 -1.0 Torr她计划测量的诊断包括：(1)两个电极电压和电流的前五次谐波、幅值和相位；(2)可见光发射的时空测量；(3)电子温度和密度的空间测量；(4)电子能量分布函数的空间测量。这些测量结果将与在密歇根大学校园的另一个反应堆上进行的测量结果进行比较。一旦对标准反应器进行了充分的表征，就可以在工业反应器的建模和实验研究分析中作为对比。这项资助将为首席研究员提供一个新的研究领域的初步经验，为未来的项目提供基础，从而推动她的职业生涯。