Research Opportunities for Women: Characterizavion of a Research RF Parallel Plate Reactor

等离子体在材料加工中变得重要， 它们可以提供一个高度化学反应的环境 同时保持相对低的总气体温度。 一种比较常见的工业反应堆由无线电 频率（RF）功率电容器耦合到两个并联 平板电极 将待处理的材料放置在 其中一个电极和在填充气体中产生的等离子体 提供所需的自由基、离子和高能中性物质 特定的化学过程。 有了这个职业发展奖，PI将设计和 构建“标准”RF参考平行板反应器 具有最大的诊断能力以及某些 适合建模的特性。 具体而言是 反应堆将具有以下特性 - 射频功率（电容耦合） 0 - 500瓦 - RF频率 13.56mhz的 - 电极间距 2.54 cm - 氩气 九十九点九九九 - 气流 2 - 20 sccm - 气体压力 0.1-1.0托 她计划测量的诊断包括：（1）第一个 电压和电流的五次谐波、幅值和相位 在两个电极上，（2）空间和时间测量 可见光发射，（3）空间测量 电子温度和密度;（4）空间测量 电子能量分布函数。 的结果 这些测量结果将与 密歇根大学校园里的另一个反应堆。 一旦 标准反应堆的特征已完全确定， 为了在建模和实验研究中进行比较， 工业反应堆分析 这笔赠款将推动 PI的职业生涯，提供她在一个新的 未来项目可以基于的研究路线。

Plasmas have become important in materials processing because they can provide a highly chemically reactive environment while remaining at relatively low overall gas temperatures. One of the more common industrial reactors consists of radio frequency (RF) power capacitively coupled to two parallel plate electrodes. The material to be processed is placed on one of the electrodes and the plasma generated in the fill gas provides the free radicals, ions and energetic neutrals needed for the particular chemical process. With this Career Advancement Award, the PI will design and construct a "standard" RF reference parallel plate reactor with maximum capability for diagnostics as well as certain characteristics desirable for modeling. Specifically, the reactor will have the following properties - RF power (capacitively coupled) 0 - 500 Watts - RF Frequency 13.56 MHz - Electrode Spacing 2.54 cm - argon 99.999% - Gas flow 2 - 20 sccm - Gas pressure 0.1 -1.0 Torr The diagnostics she plans to measure include: (1) the first five harmonics, magnitude and phase of the voltage and current at both electrodes, (2) spatial and temporal measurements of the visible optical emission, (3) spatial measurements of eletron temperature and density, and (4) spatial measurements of the electron energy distribution function. The results of these measurements will be compared to measurements taken on another reactor on the University of Michigan campus. Once the standard reactor is fully characterized, it will be used as for comparison in the modeling and experimental study and analysis of industrial reactors. The grant will advance the career of the PI by providing her initial experience in a new line of research on which future projects can be based.