Research Initiation Grant: Development and Fabrication of Shape Memory Effect NiTi Micro-Switches and Micro-Motion Actuators

提出了形状记忆效应（SME）薄膜作为微开关和微致动器的智能材料。与需要外部控制的静电致动器相比，SME材料作为“智能”致动器材料具有吸引力。化学计量NiTi是最有前途的SME薄膜候选材料，因为它是一种坚韧的材料，具有30—60℃的方便温度转变范围，并且对变形具有很强的恢复力。由于掺杂剂，如Ca，从根本上改变了转变温度，NiTi将在作者使用射频溅射共沉积到Si和Al2O3衬底上然后进行热退火制造的微传感器中找到应用。最佳工艺条件及TEM、XRD分析。使用这些薄膜的原型微开关和执行器将使用传统的光刻技术制造。

The development of Shape Memory Effect (SME) thin films as intelligent materials for micro-switches and micro-mation actuators is proposed. SME materials as "intelligent" actuator materials are attractive compared to electrostatic actuators requiring external control. Stoichimetric NiTi is the most promising SME thin film candidate as it is a tough material with a convenient termperature transformation range of 30--60 C, and also exhibits a strong recovery force on deformation. As dopants, such as Ca, radically alter the transformation temperatures, NiTi will find applications in both micro-sensor fabricated by the author using RF sputter co-deposition onto Si and Al2O3 substrates followed by thermal snnealing. The optimal conditions and analysis by TEM and XRD. Prototypical micro-switches and actuators using these films will be fabricated using conventioal lithographic techniques.