Research Initiation Grant: Development and Fabrication of Shape Memory Effect NiTi Micro-Switches and Micro-Motion Actuators

介绍了形状记忆效应(SME)薄膜作为微开关和微机械驱动器智能材料的研究进展。与需要外部控制的静电致动器相比，作为“智能”致动器材料的SME材料更具吸引力。化学计量比NiTi是最有前景的SME薄膜候选材料，因为它是一种韧性材料，温度变化范围在30-60℃之间，而且具有很强的形变恢复力。由于掺杂，如钙，从根本上改变了转变温度，NiTi将在作者制作的微型传感器中得到应用，该传感器采用射频溅射共沉积在Si和Al_2O_3衬底上，然后进行热扫描。确定了最佳反应条件，并用透射电子显微镜和X射线衍射仪进行了分析。使用这些薄膜的原型微开关和致动器将使用传统的光刻技术来制造。

The development of Shape Memory Effect (SME) thin films as intelligent materials for micro-switches and micro-mation actuators is proposed. SME materials as "intelligent" actuator materials are attractive compared to electrostatic actuators requiring external control. Stoichimetric NiTi is the most promising SME thin film candidate as it is a tough material with a convenient termperature transformation range of 30--60 C, and also exhibits a strong recovery force on deformation. As dopants, such as Ca, radically alter the transformation temperatures, NiTi will find applications in both micro-sensor fabricated by the author using RF sputter co-deposition onto Si and Al2O3 substrates followed by thermal snnealing. The optimal conditions and analysis by TEM and XRD. Prototypical micro-switches and actuators using these films will be fabricated using conventioal lithographic techniques.