Research Initiation Grant: Development and Fabrication of Shape Memory Effect NiTi Micro-Switches and Micro-Motion Actuators

本文综述了形状记忆效应（SME）薄膜的研究进展， 用于微型开关和微型化的智能材料 致动器提出。 中小企业材料“智能化” 与静电致动器材料相比， 需要外部控制的执行器。 化学计量NiTi 是最有前途的中小企业薄膜候选人，因为它是一个 温度适宜的坚韧材料 转化范围为30- 60 ℃，并且还表现出 对变形恢复力强。 作为掺杂剂，例如 Ca，从根本上改变转变温度，NiTi 将在两种微传感器中找到应用， 作者采用射频溅射共沉积法在Si和Al_2 O_3 衬底，然后进行热退火。 最优 通过TEM和XRD分析。 原型 使用这些薄膜的微型开关和执行器将 使用传统的光刻技术制造。

The development of Shape Memory Effect (SME) thin films as intelligent materials for micro-switches and micro-mation actuators is proposed. SME materials as "intelligent" actuator materials are attractive compared to electrostatic actuators requiring external control. Stoichimetric NiTi is the most promising SME thin film candidate as it is a tough material with a convenient termperature transformation range of 30--60 C, and also exhibits a strong recovery force on deformation. As dopants, such as Ca, radically alter the transformation temperatures, NiTi will find applications in both micro-sensor fabricated by the author using RF sputter co-deposition onto Si and Al2O3 substrates followed by thermal snnealing. The optimal conditions and analysis by TEM and XRD. Prototypical micro-switches and actuators using these films will be fabricated using conventioal lithographic techniques.