Microcontamination Control Experiment

微污染控制实验

• 批准号: 9251929
• 负责人: Sandra Harris
• 金额: $ 1.93万
• 依托单位: Clarkson University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1992
• 资助国家: 美国
• 起止时间: 1992-07-15 至 1994-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9251929&HistoricalAwards=false
• 关键词: Microcontamination; Control; Experiment

Undergraduate students at the Chemical Engineering Department of Clarkson University experiment with microcontamination control, particularly as it applies to gas filtration. Students work with particle size distributions and statistical data analysis, measuring and controlling particles smaller than one micrometer. The techniques and nomenclature learned in this experiment aid students in such broad fields as pollution control and industrial hygiene, and also give them specific insight into the concerns of the microelectronics industry. The major cause of low manufacturing yields in microelectronics production is the device failures produced by microcontamination. As devices with smaller critical dimensions are produced the problems posed by submicron particle contamination will increase. The new equipment in this laboratory experiment includes a laser light scattering particle counter, a condensation nucleus counter, a laminar air flow clean hood, ultraclean stainless steel tubing, valves, regulators, and filter housings, and a computer for data logging.

克拉克森大学化学工程系的本科生进行了微污染控制的实验，特别是它适用于气体过滤。学生研究颗粒大小分布和统计数据分析，测量和控制小于一微米的颗粒。在这个实验中所学到的技术和术语有助于学生在污染控制和工业卫生等广泛的领域，也使他们对微电子工业所关注的问题有了具体的了解。微电子生产中制造成品率低的主要原因是微污染造成的器件故障。随着临界尺寸越来越小的器件的生产，亚微米颗粒污染所带来的问题将会增加。本实验室实验的新设备包括激光散射粒子计数器、冷凝核计数器、层流洁净罩、超净不锈钢管、阀门、调节器、过滤器外壳和一台数据记录计算机。