Microcontamination Control Experiment

克拉克森大学化学工程系的本科生尝试微污染控制，特别是在气体过滤方面。学生研究颗粒大小分布和统计数据分析，测量和控制小于一微米的颗粒。在本实验中学到的技术和术语有助于学生在污染控制和工业卫生等广泛领域中学习，并使他们对微电子行业关注的问题有了具体的见解。微电子生产中制造成品率低的主要原因是由微污染造成的器件故障。随着具有更小临界尺寸的器件的生产，亚微米颗粒污染带来的问题将会增加。本实验室实验中的新设备包括激光光散射颗粒计数器、凝结核计数器、层流气流清洁罩、超清洁不锈钢管、阀门、调节器和过滤器外壳，以及用于数据记录的计算机。

Undergraduate students at the Chemical Engineering Department of Clarkson University experiment with microcontamination control, particularly as it applies to gas filtration. Students work with particle size distributions and statistical data analysis, measuring and controlling particles smaller than one micrometer. The techniques and nomenclature learned in this experiment aid students in such broad fields as pollution control and industrial hygiene, and also give them specific insight into the concerns of the microelectronics industry. The major cause of low manufacturing yields in microelectronics production is the device failures produced by microcontamination. As devices with smaller critical dimensions are produced the problems posed by submicron particle contamination will increase. The new equipment in this laboratory experiment includes a laser light scattering particle counter, a condensation nucleus counter, a laminar air flow clean hood, ultraclean stainless steel tubing, valves, regulators, and filter housings, and a computer for data logging.