Energy Transfer and Trapping in Hyperthermal Energy Alkali and Reactive Ion Collisions with Surfaces

提出的工作的中心目标是建立过热离子表面碰撞中的散射和电荷转移动力学的定量模型。提出的工作重点是碱离子从铜表面散射作为模型系统来研究这些动力学。测量了散射的正离子和中性离子的能量分布和角分布。弹道模拟将用于测试散射模型和势，并确定能量转移和捕获机制。能谱峰宽将用于研究表面原子的结合力。其他技术，包括俄歇电子能谱，将用于研究捕获概率的趋势，作为离子和表面种类、能量和几何形状的函数。将开发新的模拟能力来确定捕获机制。将使用散射中性和离子通量的比较来确定中和概率，并研究电荷转移在碰撞和捕获动力学中的作用。提出了新的实验和模拟能力，以便研究反应性离子表面碰撞的碰撞、电荷转移和捕获动力学。捕获趋势和上层沉积将研究与俄歇和扫描隧道显微镜。从这些研究中获得的信息将有助于模拟发生在表面加工和薄膜沉积中的相互作用。这些信息也可用于优化这些技术。＊＊＊

9313818 Cooper The central objective of the proposed work is to develop quantitative models of the scattering and charge transfer dynamics in hyperthermal ion-surface collisions. The proposed work is focussed on the scattering of alkali ions from copper surfaces as model systems to study these dynamics. Both the energy and angular distributions of scattered positive ions and neutrals are measured. Trajectory simulations will be used to test scattering models and potentials, and determine energy transfer and trapping mechanisms. Energy spectra peak widths will be used to study surface atom binding forces. Additional techniques, including Auger Electron Spectroscopy, will be used to study trends in the trapping probabilities as a function of ion and surface species, energy, and geometry. New simulation capabilities will be developed to determine trapping mechanisms. Comparisons of scattered neutral and ion fluxes will be used to determine neutralization probabilities and investigate the role of charge transfer in the collision and trapping dynamics. New experimental and simulation capabilities are proposed to enable the study of the collision, charge transfer and trapping dynamics of reactive ion-surface collisions. Trapping trends and overlayer deposition will be studied with Auger and scanning tunneling microscopy. The information obtained from these studies will be useful for modeling the interactions that occur in surface processing and thin film deposition. Such information could also be used to optimize these techniques. ***