Exploratory Investigation of Laser Induced CVD Applied to Micromechanical Fabrication

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9314071 Pegna This proposal work will apply the emerging technology of Laser-induced Chemical Vapor Deposition (LCVD) to the fabrication of 3-D micromechanical devices. The proposed work will involve modification of the planar LCVD process to fabricate 3-D objects at micro-dimensions. The method will 1)pattern material into arbitrary shapes including internal features, 2)be used to fabricate an entire 3-D structure, 3)rapidly adapt to new products through the use of CAD tools, and 4)be applicable to a wide variety of materials. ***