Exploratory Investigation of Laser Induced CVD Applied to Micromechanical Fabrication

激光诱导 CVD 应用于微机械制造的探索性研究

• 批准号: 9314071
• 负责人: Joseph Pegna
• 金额: $ 3.3万
• 依托单位: Rensselaer Polytechnic Institute
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1993
• 资助国家: 美国
• 起止时间: 1993-08-01 至 1995-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9314071&HistoricalAwards=false
• 关键词: Exploratory; Investigation; Laser; Induced; CVD

9314071 Pegna This proposal work will apply the emerging technology of Laser-induced Chemical Vapor Deposition (LCVD) to the fabrication of 3-D micromechanical devices. The proposed work will involve modification of the planar LCVD process to fabricate 3-D objects at micro-dimensions. The method will 1)pattern material into arbitrary shapes including internal features, 2)be used to fabricate an entire 3-D structure, 3)rapidly adapt to new products through the use of CAD tools, and 4)be applicable to a wide variety of materials. ***

本提案工作将激光诱导化学气相沉积（LCVD）新兴技术应用于三维微机械器件的制造。提出的工作将涉及平面LCVD工艺的修改，以制造微观尺寸的三维物体。该方法将1)将材料图案成任意形状，包括内部特征，2)用于制造整个3- d结构，3)通过使用CAD工具快速适应新产品，4)适用于各种材料。＊＊＊