Second Generation Lead CVD Precursors for PbTio3

这个小企业创新研究（SBIR）项目是在无机化学的一般领域和金属有机化学气相沉积（MOCVD）的子领域。第一阶段研究的目的是设计、合成和分解钛酸铅、钛酸锆铅（PZT）和钛酸铅镧（PLZT）的有机铅前体。这些材料是铁电陶瓷，可用于辐射硬存储器、电光空间光调制器、压电致动器和红外探测器。目前使用的前体要么挥发性太强，毒性太强，例如四乙基铅，要么挥发性不够，无法用于MOCVD应用。将制备两类新的醇化铅；(1)具有空间要求的配体以防止聚集的醇氧化铅；(2)环戊二烯基醇氧化铅，被认为比烷基铅前体更稳定。在对铅前驱体进行纯化和表征后，它们将与适当的钛和/或锆烷氧化物一起分解，以生产钛酸铅或PZT薄膜。化学气相沉积铅基铁电薄膜是各种电子器件所需要的。更安全、优化的铅前体的合成将对这些材料的市场产生直接影响。＊＊＊

9360671 Gordon This Small Business Innovation Research (SBIR) project is in the general area of inorganic chemistry and in the subfield of Metalorganic Chemical Vapor Deposition (MOCVD). The objective of the Phase I research is the design, synthesis, and decomposition studies of organolead precursors to lead titanate, lead zirconate titanate (PZT) and lead lanthanum titanate (PLZT). These materials are ferroelectric ceramics and find uses in radiation-hard memories, electrooptic spatial light modulators, piezoelectric actuators and infrared detectors. Currently used precursors are either too volatile and too toxic, e.g. tetraethyllead or not volatile enough for MOCVD applications. Two new classes of lead alkoxides will be prepared; (1) lead alkoxides with spatially demanding ligands to prevent aggregation, an (2) cyclopentadienyllead alkoxides, believed to be more stable than alkyllead precursors. Following purification and characterization of the lead precursors, they will be decomposed along with appropriate titanium and/or zirconium alkoxides to produce lead titanate or PZT films. %%% Chemical vapor deposition of lead-based ferroelectric films is desirable for a variety of electronic devices. Synthesis of safer, optimized lead precursors will have an immediate effect on the market for these materials. ***