Innovative High Powered Vacuum Ultra Violet Light Source

创新的高功率真空紫外光源

• 批准号: 9361318
• 负责人: Donald McNeill
• 金额: $ 6.5万
• 依托单位: Efthimion Enterprises, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-01-01 至 1994-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9361318&HistoricalAwards=false
• 关键词: Innovative; Powered; Vacuum; Ultra; Violet

9361318 McNeill A high power density (greater than 1,000 W/cc) microwave-driven plasma source has been developed, and it can potentially be an efficient vacuum ultra violet (VUV) light source. This assessment is based upon previous spectroscopic measurements and power balance analysis of steam plasmas created at atmospheric pressure with only 6 kW of power. We propose to a new UV light source with high power below 200 nm. This class of light source can be potentially applied to photolithography and surface treatment of polymers.

9361318麦克尼尔一种高功率密度（大于1，000 W/cc）微波驱动等离子体 源，它可能是一个有效的真空紫外（VUV）光源。这一评估是基于此前 光谱测量和功率平衡分析的蒸汽等离子体在大气压下创建只有6千瓦的功率。我们提出了一种新的紫外光源，具有高功率低于200 nm。这类光源可以潜在地应用于光刻和聚合物的表面处理。