Fullerene Precursor Low Temperature Diamond Film Deposition on Electronic Substrates

9361391 Arya热管理是2维和3维多芯片设计中的关键方面之一 在电子设备中，MCM模块（MCM）的功能密度增加，以确保可靠性。 金刚石具有已知的最高导热性，但却是电绝缘体。提出了在高热导率金属基复合材料热沉上沉积高质量的存款金刚石膜，这将允许在先进的MCM封装概念中的粉末耗散数百瓦。 富勒烯化学的最新发展表明， C60、C70等的分子主要是Sp3型的，并且在空间上相当接近金刚石。 MER已经证明，这些原子在高能等离子体中的少量重排可以导致富勒烯转化为金刚石。这种独特的富勒烯气相前体工艺将被证明和优化，以在MMC和其他电子基板上以非常高的生长速率和低温生产高质量的薄和厚金刚石薄膜。 将沿着不同的等离子气体化学研究单一、混合和磁增强等离子体系统，以生产多晶金刚石膜以及地质尺寸和质量金刚石的独立膜，这将为第二阶段优化和扩大规模以经济地生产金刚石膜奠定基础。 ***

9361391 Arya Thermal management is one of the critical aspects in the design of the 2 and 3 dimensional multichip modules (MCM's) to ensure reliability at increased functional densities in electronic devices. Diamond has the highest know thermal conductivity and yet is an electrical insulator. It is proposed to deposit high quality diamond films on high thermal conductivity metal matrix composite heat sinks which will allow powder dissipation of several hundreds of watts in the advance MCM packaging concepts. Recent developments in fullerene chemistry show that the carbon atoms in the pentagons of the spheroidal molecules of C60, C70, etc are predominantly Sp3 hydribdized and are sterically fairly close to the diamond. MER has demonstrated that a small amount of rearrangement of these atoms in highly energetic plasma can result in transformation of fullerenes into diamond. This unique fullerene vapor phase precursor process will be demonstrated and optimized to produce will bonded, high quality thin and thick diamond films at very high growth rates and at low temperatures on the MMC and other electronic substrates. Single, hybrid and magnetically enhanced plasma systems will be investigated along with different plasma gas chemistries to produce polycrystalline diamond films as well as free standing film of geological size and quality diamond which will establish a basis for Phase II optimization and scale-up to economically produce diamond films. ***