Development of Advanced Signal Processing Algorithms for On-Line Temperature Profile Measurement in Semiconductor Manufacturing

半导体制造中在线温度分布测量的先进信号处理算法的开发

• 批准号: 9400732
• 负责人: Guanghan Xu
• 金额: $ 36.82万
• 依托单位: University of Texas at Austin
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-09-15 至 1999-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9400732&HistoricalAwards=false
• 关键词: Development; Advanced; Signal; Processing; Algorithms

This research is directed towards the development, implementation, and demonstration of advanced model-based signal processing algorithms for real-time measurement of wafer temperature profile in Rapid Thermal Processing (RTP), RTP cluster tools are strategically important for submicron semiconductor manufacturing because of trends towards reduced thermal budget and tightened process control requirements on large diameter silicon wafers. Despite its significant advantages, commercial versions of RTP modules for various chemical vapor deposition applications are not available. In this project, the investigators are developing advanced model- based signal processing algorithms, which when coupled with the acoustic thermometry and acoustic/pyrometer approaches, accurately measure the wafer temperature profile at fast acquisition rates and with a minimum number of sensors. This entails algorithm development, implementation, and validation using real data from commercial RTP tools at UT-Austin and SEMATECH.

这项研究旨在开发、实施和演示基于模型的先进信号处理算法，用于实时测量快速热处理 (RTP) 中的晶圆温度分布。RTP 集群工具对于亚微米半导体制造具有战略意义，因为大直径硅晶圆的热预算减少，工艺控制要求严格。 尽管具有显着的优势，但用于各种化学气相沉积应用的 RTP 模块的商业版本尚不可用。 在该项目中，研究人员正在开发基于模型的先进信号处理算法，该算法与声学测温和声学/高温计方法相结合，能够以快速采集速率和最少数量的传感器准确测量晶圆温度分布。 这需要使用来自 UT-Austin 和 SEMATECH 商业 RTP 工具的真实数据进行算法开发、实施和验证。