A Computational Approach to the Design of Dynamic Microelectronmechanial Structures

动态微机电结构设计的计算方法

• 批准号: 9403903
• 负责人: Bruce Donald
• 金额: $ 5万
• 依托单位: Cornell University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-08-15 至 1996-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9403903&HistoricalAwards=false
• 关键词: Computational; Approach; Design; Dynamic; Microelectronmechanial

9403903 Donald This award, in the Small Grants for Exploratory Research mode, investigates computational aspects of engineering design problems that are amenable to tractable algorithmic solution. In particular, the focus is on determining the shape of microelectromechanical (MEM) structures, given specifications of their parameterized geometry and their functionality (parametric design). MEM structures are particularly suited for automated parametric design because of (i) their highly specialized and automated production process, which allows only a very limited number of elementary structures; (ii) the rather simple geometry and functionality of the devices; and (iii) the possibly large number of devices produced simultaneously in one manufacturing process. In this exploratory research, actuator arrays for micro- manipulation will be built based on single-crystal torsional oscillators. Optimization in design and fabrication will be investigated, with the goal of determining if the generated forces can be sufficient, for example, to move a piece of paper. The research will develop models for the mechanics and a theory of manipulation, and efficient algorithms will be described for evaluation.

小行星9403903 这个奖项，在探索性研究模式的小赠款，调查工程设计问题的计算方面，是服从于易于处理的算法解决方案。 特别是，重点是确定微机电（MEM）结构的形状，给定其参数化几何形状和功能（参数化设计）的规格。 MEM结构特别适合于自动化参数设计，因为（i）它们的高度专业化和自动化的生产过程，其仅允许非常有限数量的基本结构;（ii）器件的相当简单的几何形状和功能;以及（iii）在一个制造过程中可能同时生产大量器件。 在本研究中，将以单晶扭转振子为基础，建构微操作驱动器阵列。 将研究设计和制造中的优化，目标是确定所产生的力是否足以移动一张纸。 该研究将开发力学模型和操作理论，并将描述有效的算法进行评估。