A Computational Approach to the Design of Dynamic Microelectronmechanial Structures

9403903 Donald该奖项以探索性研究小额资助模式，研究工程设计问题的计算方面，这些问题可以通过可处理的算法解决。特别是，重点是确定微型机电（MEM）结构的形状，给定其参数化几何形状和功能规格（参数化设计）。MEM结构特别适合自动化参数化设计，因为(i)其高度专业化和自动化的生产过程，只允许非常有限数量的基本结构；（ii）设备的结构和功能相当简单；（iii）在一个制造过程中同时生产的可能大量的设备。在本探索性研究中，将建立基于单晶扭振的微操作致动器阵列。设计和制造的优化将被研究，其目标是确定所产生的力是否足够，例如，移动一张纸。该研究将开发力学模型和操作理论，并将描述用于评估的有效算法。

9403903 Donald This award, in the Small Grants for Exploratory Research mode, investigates computational aspects of engineering design problems that are amenable to tractable algorithmic solution. In particular, the focus is on determining the shape of microelectromechanical (MEM) structures, given specifications of their parameterized geometry and their functionality (parametric design). MEM structures are particularly suited for automated parametric design because of (i) their highly specialized and automated production process, which allows only a very limited number of elementary structures; (ii) the rather simple geometry and functionality of the devices; and (iii) the possibly large number of devices produced simultaneously in one manufacturing process. In this exploratory research, actuator arrays for micro- manipulation will be built based on single-crystal torsional oscillators. Optimization in design and fabrication will be investigated, with the goal of determining if the generated forces can be sufficient, for example, to move a piece of paper. The research will develop models for the mechanics and a theory of manipulation, and efficient algorithms will be described for evaluation.