Development of Back Illuminated CCDs

背照式CCD的开发

• 批准号: 9500290
• 负责人: Michael Lesser
• 金额: $ 79.92万
• 依托单位: University of Arizona
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-07-15 至 1998-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9500290&HistoricalAwards=false
• 关键词: Development; Back; Illuminated; CCDs

ABSTRACT 9500290 Lesser, Michael Techniques have been developed to produce thinned, black illuminated charge-coupled device (CCD) detectors for astronomical observations. These techniques have matured to the point where they are now routinely applied to detectors of many different formats from several different manufacturers. This project extends this development into several new areas of importance to the scientific community, and particularly to astronomy. New techniques will be developed to thin and optimize the very large format CCDs ( 10 cm 2, 2048x2048 pixels) which are now at the forefront of semiconductor manufacturing technology. These large format devices are necessary for the construction of CCD mosaics to cover the huge focal planes of large telescopes and large telescope spectrographs. The new techniques to be developed include very large area thinning, methods to package large devices for flat and often buttable operation with simplified electrical interconnections, and the capability to characterize the detectors at cryogenic temperatures prior to thinning. Second, the processes will be extended to thin and optimize the very small, high speed readout devices required for the active and adaptive optics instrumentation planned for nearly all large telescopes. These detectors must have the highest possible quantum efficiency in the visible and near-IR to obtain sufficient signal-to-noise in the extremely short exposure times required. The techniques to be developed will be available to the entire scientific community. Back illuminated devices are of great important to many scientific disciplines other than astronomy. Physics, chemistry, engineering, and medicine are all in need of the low light level, wide bandpass imaging detectors which will be developed here. ***

摘要 9500290 Lesser，Michael 已开发出生产用于天文观测的薄型黑色照明电荷耦合器件探测器的技术。这些技术已经成熟到现在它们被常规地应用于来自几个不同制造商的许多不同格式的探测器的程度。该项目将这一发展扩展到对科学界，特别是天文学具有重要意义的几个新领域。 将开发新的技术来薄化和优化超大格式CCD（10 cm 2，2048x2048像素），这些CCD现在处于半导体制造技术的最前沿。这些大幅面设备对于构建CCD马赛克以覆盖大型望远镜和大型望远镜摄谱仪的巨大焦平面是必要的。将要开发的新技术包括非常大面积的减薄，方法来封装大型设备的平面和往往对接操作与简化的电气互连，并在减薄之前，在低温下表征的检测器的能力。其次，该过程将扩展到薄和优化非常小的，高速读出设备所需的主动和自适应光学仪器计划几乎所有的大型望远镜。这些探测器必须在可见光和近红外波段具有尽可能高的量子效率，以便在极短的曝光时间内获得足够的信噪比。 拟开发的技术将提供给整个科学界。背照式器件在天文学以外的许多科学领域都有着重要的意义。物理、化学、工程、医学等领域都需要微光、宽带通成像探测器。 ***