CAREER: Advanced Control Stategies For Microelectronics Manufacturing Processes

这是一项学院早期职业发展(Career)补助金，既包括研究，也包括教育部分。研究：微电子行业不断面临挑战，需要改进制造过程的性能，以响应竞争激烈的国际市场对高性能的期望。先进的过程控制技术为迎接挑战和提供严格的过程控制带来了巨大的希望。这项研究的目的是开发和评估先进的工艺控制策略，用于控制与微电子设备制造相关的工艺。这项研究解决了三个基本问题，即(1)可能破坏工艺模型准确性的不确定性的表征，(2)基于模型的控制器的设计，以及(3)控制策略在特定工艺操作中的应用，包括等离子体刻蚀和金属-有机化学气相沉积。将与瑞士洛桑的瑞士联邦理工学院自动化研究所共同开展国际合作研究工作。教育：教学计划的目标是通过以下方式提高佛罗里达大学控制工程教育的质量：(1)在本科过程控制课程中引入计算机辅助控制设计工具，(2)在本科过程控制实验室设计新的实验，包括使用连接到24塔板蒸馏塔的工业过程控制计算机的实验，(3)为用于控制工程教育的多学科虚拟控制实验室开发计算机模块，以及(4)为化学工程师的研究生控制课程开发高级过程控制设计项目。这些活动将得到计算机工具的支持，如多媒体演示、课堂模拟开发和使用投影板进行课堂演示。

This is a Faculty Early Career Development (CAREER) grant which includes both a research as well as an educational component. Research: The microelectronics industry is constantly challenged to improve the performance of the manufacturing processes to respond to the high-performance expectations of a competitive international market. Advanced process control technologies hold great promise for rising to the challenge and delivering tight process control. The objective of this research is to develop and evaluate advanced process control strategies useful for the control of processes of relevance to the fabrication of microelectronics devices. The research addresses three fundamental issues, namely, (1) the characterization of uncertainties that may corrupt the accuracy of process models, (2) the design of robust model-based controllers, and (3) the application of the control strategies to specific processing operations, including plasma etching and metal-organic chemical vapor deposition. An international collaborative research effort will be established with the Ins titut d'Automatique of the Swiss Federal Institute of Technology in Lausanne, Switzerland. Education: The objective of the teaching plan is to enhance the quality of control- engineering education at the University of Florida through (1) the introduction of computer-aided control design tools in the undergraduate process control course, (2) the design of new experiments in the undergraduate process control laboratory, including experiments with an industrial process control computer connected to a 24-tray distillation column, (3) the development of computer modules for a multidisciplinary Virtual Control Laboratory for control engineering education, and (4) the development of projects for advanced process control design for a graduate control course for chemical engineers. These activities will be supported by computer tools such as multimedia presentations, in-class development of simulations, and the use of projection panels for in-class demonstrations.