Semiconductor Micro-Fabrication Equipment for Optoelectronic Infrastructure and Research

用于光电基础设施和研究的半导体微制造设备

• 批准号: 9512298
• 负责人: Peter Delfyett
• 金额: $ 10万
• 依托单位: The University of Central Florida Board of Trustees
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-09-01 至 1998-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9512298&HistoricalAwards=false
• 关键词: Semiconductor; Micro; Fabrication; Equipment; Optoelectronic

9512298 Delfyett This proposal request state-of-the-art material and device processing equipment for a new clean-room located in a research facility dedicated to optical science and engineering at the University of central Florida. The specific equipment is for (1) the deposition of mental al films and (2) the etching of waveguide and mesa structures in semiconductor substrates. An important part of the research and education program is to fabricate the photonic devices and to perform detailed device modeling and characterization. ***

该提案要求为位于佛罗里达中部大学光学科学与工程研究设施的新洁净室提供最先进的材料和设备处理设备。该特定设备用于(1)沉积金属薄膜和(2)蚀刻半导体衬底中的波导和台面结构。研究和教育计划的一个重要组成部分是制造光子器件并执行详细的器件建模和表征。＊＊＊