Semiconductor Micro-Fabrication Equipment for Optoelectronic Infrastructure and Research

点击翻译按钮获取中文摘要

9512298 Delfyett This proposal request state-of-the-art material and device processing equipment for a new clean-room located in a research facility dedicated to optical science and engineering at the University of central Florida. The specific equipment is for (1) the deposition of mental al films and (2) the etching of waveguide and mesa structures in semiconductor substrates. An important part of the research and education program is to fabricate the photonic devices and to perform detailed device modeling and characterization. ***