SBIR Phase I: A Novel Sensor for Deep Sea Applications

*9760219 JUE这个小型企业创新研究(SBIR)第一阶段项目致力于深海应用的新型压力传感器。最先进的压力传感器可以是(1)压阻式、(2)电容式或(3)压电式。前两类需要用于信号产生的能源，而压电型传感器需要温度补偿。此外，信号通常在很小的范围内是线性的。这种新型压力传感器不需要能源，在很大的压力范围内信号是线性的，并且与温度无关。虽然这里的目标是深海应用，但对传感器稍加修改就可以将工作温度范围扩展到700℃。这些压力传感器将在制造时使用和不使用放大器。传感器的响应将在较宽的压力和温度范围内进行表征。将探索利用微影光刻技术进行微细加工和集成的可行性。直接安装压力传感器用于海洋生物监测是本研究的目的之一。新型压力传感器的潜在商业应用包括：(1)监测深海生命，(2)石油测井，(3)航空航天工业，(4)汽车制造，(5)压力容器，(6)化学工业，和(7)一般工业用途。***

*** 9760219 Jue This Small Business Innovation Research (SBIR) Phase I project addresses novel pressure sensors for deep sea applications. State-of-the-art pressure sensors are either (1) piezoresistive, (2) capacitive, or (3) piezoelectric. The first two classes require an energy source for signal generation, and piezo-type sensors require temperature compensation. Further, the signal usually is linear over only a narrow range. The new pressure sensor does not require an energy source, the signal is linear over a large pressure range, and it is temperature independent. Although deep sea application is targeted here, a slight modification of the sensor can extend the operating temperature range up to 700(C. These pressure sensors will be fabricated with and without an amplifier. The sensor response will be characterized over a wide pressure and temperature range. Feasibility of microfabrication and integration using photomicrolithography will be explored. Direct mount pressure sensors for monitoring marine life is an objective of this research. Potential commercial applications of the novel pressure sensors include pressure sensors for : (1) monitoring life in deep sea, (2) oil well logging, (3) aerospace industry, (4) automotive manufacture, (5) pressure vessels, (6) chemical industry, and (7) general industrial use. ***