SBIR Phase I: A Novel Sensor for Deep Sea Applications

SBIR 第一阶段：适用于深海应用的新型传感器

• 批准号: 9760219
• 负责人: Jan-Fong Jue
• 金额: $ 9.94万
• 依托单位: MATERIALS & SYSTEMS RESEARCH INC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-01-01 至 1998-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9760219&HistoricalAwards=false
• 关键词: SBIR; Phase; Novel; Sensor; Deep

*** 9760219 Jue This Small Business Innovation Research (SBIR) Phase I project addresses novel pressure sensors for deep sea applications. State-of-the-art pressure sensors are either (1) piezoresistive, (2) capacitive, or (3) piezoelectric. The first two classes require an energy source for signal generation, and piezo-type sensors require temperature compensation. Further, the signal usually is linear over only a narrow range. The new pressure sensor does not require an energy source, the signal is linear over a large pressure range, and it is temperature independent. Although deep sea application is targeted here, a slight modification of the sensor can extend the operating temperature range up to 700(C. These pressure sensors will be fabricated with and without an amplifier. The sensor response will be characterized over a wide pressure and temperature range. Feasibility of microfabrication and integration using photomicrolithography will be explored. Direct mount pressure sensors for monitoring marine life is an objective of this research. Potential commercial applications of the novel pressure sensors include pressure sensors for : (1) monitoring life in deep sea, (2) oil well logging, (3) aerospace industry, (4) automotive manufacture, (5) pressure vessels, (6) chemical industry, and (7) general industrial use. ***

这个小型企业创新研究（SBIR）一期项目研究用于深海应用的新型压力传感器。最先进的压力传感器是(1)压阻式，(2)电容式，或(3)压电式。前两类需要能量源来产生信号，而压电型传感器需要温度补偿。此外，信号通常只在一个狭窄的范围内呈线性。新的压力传感器不需要能量源，在很大的压力范围内信号是线性的，并且与温度无关。虽然深海应用是这里的目标，但传感器的轻微修改可以将工作温度范围扩展到700(C)。这些压力传感器将制造有或没有放大器。传感器的响应将在很宽的压力和温度范围内进行表征。探讨利用显微光刻技术进行微加工和集成的可行性。直接安装压力传感器监测海洋生物是本研究的目标。这种新型压力传感器的潜在商业应用包括：(1)深海生命监测；(2)油井测井；(3)航空航天工业；(4)汽车制造；(5)压力容器；(6)化学工业；(7)一般工业用途的压力传感器。＊＊＊