SBIR Phase I: Infrared Spectroscopic Ellipsometry

SBIR 第一阶段：红外光谱椭偏仪

• 批准号: 9761473
• 负责人: Craig Herzinger
• 金额: $ 10万
• 依托单位: J.A. Woollam Company, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-01-01 至 1998-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9761473&HistoricalAwards=false
• 关键词: SBIR; Phase; Infrared; Spectroscopic; Ellipsometry

J.A. Woollam Co. Inc. will study the feasibility of extending the company's range of ellipsometric capabilities into the mid-infrared, where there exists a wealth of new monolayer, surface and interface materials characteristics to be investigated. New monolayer level surface and interface science in semiconductor-related materials systems will be studied, with the goal of transforming present IR ellipsometer technology into a quality product worldwide.

J.A. Woollam Co. Inc.将研究将公司的椭偏能力范围扩展到中红外的可行性，其中存在大量新的单层，表面和界面材料特性有待研究。将研究半导体相关材料系统中新的单层级表面和界面科学，目标是将现有的红外椭偏仪技术转化为全球优质产品。