SBIR Phase I: Infrared Spectroscopic Ellipsometry

J.A. Woollam Co. Inc.将研究将公司的椭偏能力范围扩展到中红外的可行性，其中存在大量新的单层，表面和界面材料特性有待研究。将研究半导体相关材料系统中新的单层级表面和界面科学，目标是将现有的红外椭偏仪技术转化为全球优质产品。

J.A. Woollam Co. Inc. will study the feasibility of extending the company's range of ellipsometric capabilities into the mid-infrared, where there exists a wealth of new monolayer, surface and interface materials characteristics to be investigated. New monolayer level surface and interface science in semiconductor-related materials systems will be studied, with the goal of transforming present IR ellipsometer technology into a quality product worldwide.