SBIR Phase I: Intelligent High Speed Control of Piezoelectric Actuators for Precision Manufacturing

SBIR 第一阶段：用于精密制造的压电执行器的智能高速控制

• 批准号: 9861252
• 负责人: ChiMan Kwan
• 金额: $ 10万
• 依托单位: Intelligent Automation, Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-01-01 至 1999-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9861252&HistoricalAwards=false
• 关键词: SBIR; Phase; Intelligent; Speed; Control

9861252 This Small Business Innovation Research (SBIR) Phase I project addresses the abatement of hysteresis in piezoelectric actuators. These devices lack of accuracy because of hysteresis, creep, and other nonlinearities. Maximum error due to hysteresis can be as much as 20-30% of the path covered if the actuators are not under closed-loop control. The Phase I approach is expected to compensate for this non-linearity and should reduce this error source by a factor of 100 or more compared to open loop performance. Piezoelectric actuators are critical in ultra-high precision machining such as diamond turning machines, in scanning probe microscopes, in lithography machines, and for a wide range of active vibration control and active chatter control systems. All of these applications are compromised to some extent, either in accuracy or in speed or both, by piezoelectric actuator hysteresis and creep.

9861252这项小型企业创新研究第一阶段项目致力于消除压电致动器的迟滞现象。由于迟滞、蠕变和其他非线性，这些设备缺乏准确性。如果执行器不在闭环控制下，则由滞后引起的最大误差可能高达覆盖路径的20%-30%。第一阶段方法预计将补偿这种非线性，并且与开环性能相比，应该将该误差源减少100倍或更多。在超高精度加工中，如钻石车床、扫描探头显微镜、光刻机以及各种主动振动控制和主动颤振控制系统中，压电致动器是至关重要的。由于压电致动器的迟滞和蠕变，所有这些应用都在一定程度上受到了影响，无论是在精度上还是在速度上，或者两者兼而有之。