STTR Phase I: Fabrication of Tailored Uniform, Periodic Nanostructures Using Ordered Protein Templates

STTR 第一阶段：使用有序蛋白质模板制造定制的均匀周期性纳米结构

• 批准号: 9903612
• 负责人: Brian Berland
• 金额: $ 9.99万
• 依托单位: ITN ENERGY SYSTEMS, INC.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-07-01 至 2000-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9903612&HistoricalAwards=false
• 关键词: STTR; Phase; Fabrication; Tailored; Uniform

This Small Business Technology Transfer (STTR) grant aims to develop novel, high scalable, process technology to fabricate ordered arrays of semiconductor quantum dots using ordered protein templates. Protein templates with well-defined pore structures combined with powerful low electron energy etching (LE4) dry etch techniques provide an ideal mask to create nanoscale patterns directly in the substrate. Well-ordered nanostructures can ten be formed directly by self-assembly of adatoms deposited onto the patterned substrate. These techniques will be used to create semiconductor quantum dot arrays than can revolutionize infrared detection for both commercial and military applications.Recent developments in quantum mechanical devices enable the next generation of optical and electrical devices with improved performance. Quantum mechanical devices, however, also require ordered periodic nanostructured arrays that require new large area, scalable fabrication technologies to be commercially viable. Currently, these nanostructures are typically formed by either liquid phase deposition (Langmuir-Blodgett films) or serial etching techniques such as e-beam or x-ray lithography. Standard lithography techniques produce the desired structures, but are serial (i.e., each features is made one at a time, one after the other) limiting realistic large-scale fabrication. Novel nanofabrication technologies to create quantum dot structures would allow the next generation of infrared detectors that would outperform existing semiconductor devices. Improved infrared devices could revolutionize thermal imaging and night vision applications such as military and civilian surveillance and security, see-through-smoke applications in firefighting, and thermal imaging of people buried in collapsed buildings.

这项小企业技术转让（STTR）资助旨在开发新颖的、高度可扩展的工艺技术，以使用有序蛋白质模板制造半导体量子点的有序阵列。 具有明确孔结构的蛋白质模板与强大的低电子能量蚀刻（LE 4）干法蚀刻技术相结合，提供了一种理想的掩模，可直接在基底中创建纳米级图案。 有序纳米结构可以通过沉积在图案化基底上的吸附原子的自组装直接形成。 这些技术将被用于制造半导体量子点阵列，从而为商业和军事应用带来革命性的红外探测。量子力学器件的最新发展使下一代光学和电子器件具有更高的性能。 然而，量子力学器件也需要有序的周期性纳米结构阵列，这需要新的大面积、可扩展的制造技术才能在商业上可行。 目前，这些纳米结构通常通过液相沉积（Langmuir-Blodgett膜）或连续蚀刻技术（例如电子束或X射线光刻）形成。 标准光刻技术产生所需的结构，但是是串行的（即，每个特征一次一个地、一个接一个地制造）限制了实际的大规模制造。 创造量子点结构的新型纳米纤维技术将使下一代红外探测器的性能超过现有的半导体器件。 改进的红外设备可以彻底改变热成像和夜视应用，如军事和民用监视和安全，消防中的透视烟雾应用，以及被埋在倒塌建筑物中的人的热成像。