SBIR Phase I: High Resolution In-Situ Energy Dispersive X-Ray Diffraction

这项SBIR第一阶段的提案集中于利用多毛细管X射线光学和最新开发的超导微量热计探测器来开发和表征原位能量色散X射线衍射(EDXRD)。如果对样品的访问受到限制或需要快速获取衍射数据，则选择EDXRD方法。这适用于现场应用，因为样品被处理设备包围，并且必须快速获取数据以观察样品的不同中间状态。然而，由于现有探测器的能量分辨率有限，EDX射线很少使用。此外，强连续平行光束需要高功率X射线源。研究小组将使用超导微量热计探测器。该探测器的能量分辨率接近特征X射线的自然线宽，消除了能量分辨率的限制。高强度的白色x射线束将由多毛细管x射线光学系统提供。它将收集和准直来自低功率源的X射线。第二个光学元件会将衍射光集中到探测器上。有了这个系统，就有可能以只有在波长色散系统中才可能实现的分辨率来进行EDX射线分析。提出建议的团队是来自X射线光学系统公司的材料科学家，他们将确保研究工作集中在重要的薄膜加工应用上，一旦成功演示，该系统将迅速商业化。

This SBIR Phase I proposal focuses on the development and characterization of in-situ energy dispersive x-ray diffraction (EDXRD) by using polycapillary x-ray optics and a newly developed superconducting microcalorimeter detector. EDXRD is the method of choice if access to the sample is restricted or the diffraction data needs to be acquired quickly. This applies to in-situ applications, since the sample is surrounded by processing equipment and data has to be acquired quickly to observe different intermediate states of the sample. However, EDXRD is rarely used, since the energy resolution of available detectors is limited. In addition, intense continuous parallel beams require high power x-ray sources.The research team will use a superconducting microcalorimeter detector. The energy resolution of this detector approaches the natural line width of characteristic x-rays and removes the energy resolution as a limitation. The intense 'white' x-ray beam will be provided by a polycapillary x-ray optic. It will collect and collimate x-rays from a low power source. A second optic will concentrate the diffracted beam onto the detector. With this system it will be possible to perform EDXRD at a resolution that has only been possible in wavelength dispersive systems. The proposing team, the material scientists from X-Ray Optical Systems, will ensure that the research effort is focused on important thin film processing applications and the system will become rapidly commercialized once successfully demonstrated.