SBIR Phase I: High Resolution In-Situ Energy Dispersive X-Ray Diffraction

该SBIR第一阶段提案的重点是通过使用多毛细管X射线光学器件和新开发的超导微量热计检测器来开发和表征原位能量色散X射线衍射（EDXRD）。 如果样品的访问受到限制或需要快速获取衍射数据，EDXRD是首选方法。 这适用于现场应用，因为样品被处理设备包围，并且必须快速获取数据以观察样品的不同中间状态。 然而，EDXRD很少使用，因为可用探测器的能量分辨率有限。 此外，强烈的连续平行光束需要高功率的x射线源，研究小组将使用超导微量热计探测器。 该探测器的能量分辨率接近特征X射线的自然线宽，并消除了能量分辨率的限制。 强“白色”X射线束将由多毛细管X射线光学器件提供。 它将收集和校准来自低功率源的X射线。 第二个光学器件将衍射光束集中到检测器上。 有了这个系统，将有可能在波长色散系统中才可能的分辨率下执行EDXRD。 该项目的提出团队是来自X射线光学系统公司的材料科学家，他们将确保研究工作集中在重要的薄膜加工应用上，一旦成功演示，该系统将迅速商业化。

This SBIR Phase I proposal focuses on the development and characterization of in-situ energy dispersive x-ray diffraction (EDXRD) by using polycapillary x-ray optics and a newly developed superconducting microcalorimeter detector. EDXRD is the method of choice if access to the sample is restricted or the diffraction data needs to be acquired quickly. This applies to in-situ applications, since the sample is surrounded by processing equipment and data has to be acquired quickly to observe different intermediate states of the sample. However, EDXRD is rarely used, since the energy resolution of available detectors is limited. In addition, intense continuous parallel beams require high power x-ray sources.The research team will use a superconducting microcalorimeter detector. The energy resolution of this detector approaches the natural line width of characteristic x-rays and removes the energy resolution as a limitation. The intense 'white' x-ray beam will be provided by a polycapillary x-ray optic. It will collect and collimate x-rays from a low power source. A second optic will concentrate the diffracted beam onto the detector. With this system it will be possible to perform EDXRD at a resolution that has only been possible in wavelength dispersive systems. The proposing team, the material scientists from X-Ray Optical Systems, will ensure that the research effort is focused on important thin film processing applications and the system will become rapidly commercialized once successfully demonstrated.