SBIR Phase I: Low-Temperature, Low-Cost Manufacture of Oxide Thin Films

这个小型企业创新研究第一阶段项目将开发一种快速、低成本、低温、可扩展、环境友好的晶体氧化物薄膜沉积方法。第一阶段的具体目标是证明开发程序生长这些特定的高质量薄膜晶体的可行性，并评估它们的晶体结构、光学特性和织构。这种加工方法的商业利益将给从电子到医学再到能源的各种应用带来革命性的变化。

This Small Business Innovation Research Phase I project will develop a rapid, low-cost, low-temperature, scalable, environmentally benign method for the deposition of crystalline oxide thin films. The specific Phase I goals are to demonstrate the feasibility of developing procedures for growing these specific high-quality thin-film crystals and to evaluate their crystal structure, optical properties and texture. The commercial benefits of this type of processing method would revolutionize applications ranging from electronics to medicine to energy.