Single Molecule Spectroscopic Imaging as an Optical Nanoprobe for Chemically Amplified Photoresists

单分子光谱成像作为化学放大光刻胶的光学纳米探针

• 批准号: 0211422
• 负责人: Robert Grober
• 金额: $ 35.3万
• 依托单位: Yale University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-08-15 至 2006-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0211422&HistoricalAwards=false
• 关键词: Single; Molecule; Spectroscopic; Imaging; Optical

Professor Robert D. Grober of Yale University and Dr. James Cameron of Shipley Corporation are funded in this GOALI project by the Analytical and Surface Chemistry Program. The work is focused on single molecule spectroscopy as a way of probing photoresists. The team is using pH-sensitive fluorescent dye molecules to probe photogenerated acids on the nanoscale in chemically-amplified photoresists. Diffusion of acids and fluors through the resists will be measured, providing insight into the transport and kinetics of these systems. Single molecule spectroscopy is a relatively new laser method made possible in the past decade by extremely sensitive detectors. It allows optical characterization of phenomena at the nanoscale. It has not yet found much industrial use. Precise control of the spatial distribution of photoacid during lithographic processing is paramount for maximizing lithographic resolution. The results of the study are significant for nanotechnology and will be of benefit to the semiconducting industry.

Robert D.耶鲁大学的Grober和Shipley公司的James卡梅隆博士在这个GOALI项目中得到了分析和表面化学项目的资助。 这项工作的重点是单分子光谱作为一种探测光致抗蚀剂。该团队正在使用pH敏感的荧光染料分子来探测化学放大光致抗蚀剂中纳米级的光生酸。 酸和氟通过抗蚀剂的扩散将被测量，提供深入了解这些系统的运输和动力学。单分子光谱学是一种相对较新的激光方法，在过去的十年中，通过极其灵敏的探测器成为可能。 它允许在纳米尺度上对现象进行光学表征。 它还没有太多的工业用途。 在光刻处理期间对光酸的空间分布的精确控制对于最大化光刻分辨率是至关重要的。 研究结果对纳米技术具有重要意义，并将有益于半导体工业。