Single Molecule Spectroscopic Imaging as an Optical Nanoprobe for Chemically Amplified Photoresists

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Professor Robert D. Grober of Yale University and Dr. James Cameron of Shipley Corporation are funded in this GOALI project by the Analytical and Surface Chemistry Program. The work is focused on single molecule spectroscopy as a way of probing photoresists. The team is using pH-sensitive fluorescent dye molecules to probe photogenerated acids on the nanoscale in chemically-amplified photoresists. Diffusion of acids and fluors through the resists will be measured, providing insight into the transport and kinetics of these systems. Single molecule spectroscopy is a relatively new laser method made possible in the past decade by extremely sensitive detectors. It allows optical characterization of phenomena at the nanoscale. It has not yet found much industrial use. Precise control of the spatial distribution of photoacid during lithographic processing is paramount for maximizing lithographic resolution. The results of the study are significant for nanotechnology and will be of benefit to the semiconducting industry.