PECASE: Spectral Directional Radiative Properties of Rough Si at Elevated Temperatures

PECASE：粗糙硅在高温下的光谱定向辐射特性9875441卓敏张这是一项NSF CARAPE/PECASE基金，用于研究硅在高温下的辐射特性。首席研究员将对抛光和粗糙表面的硅晶片的定向辐射性能进行测量，范围从室温到1000摄氏度，从0.4到20微米。研究的理论部分将强调表面粗糙度对发射率和透射率的影响。此外，还将研究载流子散射率与温度的关系以及光子增强吸收等基本机制。根据本项目确定的粗糙硅的辐射特性将用于详细的热传递分析，以预测晶片向辐射计和快速热处理(RTP)室发射和反射的辐射，以优化RTP室的设计。此外，还提出了一项综合教育计划，以通过制定微型热科学计划和编写适当的教学和实验室手册来促进热科学工程教育。

PECASE: Spectral Directional Radiative Properties of Rough Si at Elevated Temperatures9875441Zhuomin ZhangThis is an NSF CAREER/PECASE grant for research on the radiative properties of silicon at elevated temperatures. The principal investigator will conduct measurements of the directional radiative properties of Si wafers with polished and rough surfaces from room temperature up to 1000 C and from 0.4 to 20 micrometers. The theoretical part of the study will emphasize the effect of surface roughness on emittance and transmittance. The fundamental mechanisms, such as the temperature dependence of the carrier scattering rate and photon-enhanced absorption, will also be investigated.The radiative properties of rough Si determined from this project will be used in a detailed heat transfer analysis to predict the emitted and reflected radiation from the wafer to the radiometer and the rapid thermal processing (RTP) chamber to optimize the RTP chamber design. In addition, an integrated educational plan is proposed to advance thermal science engineering education through the development of a microscale thermal science program and the writing of appropriate instructional and laboratory manuals.