SBIR Phase I: Lithium Based Extreme Ultraviolet (EUV) Radiation Source for Next Generation Lithography

SBIR 第一阶段：用于下一代光刻的锂基极紫外 (EUV) 辐射源

• 批准号: 0319484
• 负责人: Alexander Bykanov
• 金额: $ 10万
• 依托单位: Science Research Laboratory Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-07-01 至 2003-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0319484&HistoricalAwards=false
• 关键词: SBIR; Phase; Lithium; Based; Extreme

This Small Business Innovation Research Phase I project will build and test a lithium cell that will be integrated with an all-solid-state modulator to produce an efficient, 13.5 nm, EUV source, for next generation, sub-70 nm, lithography. To date, a reliable, long-lived, lithium-based discharge cell has not been developed, despite the considerable advantages such a development would engender. These advantages are: (1) lithium will be four times as efficient as xenon; (2) increased efficiency will greatly alleviate waste heat removal; (3) a thin coating of liquid lithium will protect discharge electrodes and result in longer-lived electrodes and; (4) lithium heat pipes which can very effectively remove heat from the electrodes can be easily incorporated into the design. This project aims to complete a design of a lithium cell that will be fabricated and tested in Phase II.EUV sources have a significant market in the semiconductor industry for next generation lithography with annual sales of $200 million, starting in CY 2006. The estimate is based on the market for excimer lasers used in current generation DUV lithography.

该小型企业创新研究第一阶段项目将构建和测试一个锂电池，该电池将与全固态调制器集成，以产生高效的13.5 nm EUV光源，用于下一代70 nm以下光刻。迄今为止，还没有开发出可靠的、长寿命的锂基放电电池，尽管这种开发会产生相当大的优点。这些优点是：（1）锂的效率将是氙的四倍;（2）提高的效率将大大减轻废热去除;（3）液体锂的薄涂层将保护放电电极并导致更长寿命的电极;以及（4）可以非常有效地从电极去除热量的锂热管可以容易地结合到设计中。 该项目旨在完成锂电池的设计，该电池将在第二阶段进行制造和测试。EUV光源在半导体行业的下一代光刻技术中具有重要的市场，从2006年开始，年销售额为2亿美元。这一估计是基于当前DUV光刻中使用的准分子激光器的市场。