STTR Phase I: Fabrication of Large-Area, High-Density Microdischarge Arrays on Flexible Substrates

STTR 第一阶段：在柔性基板上制造大面积、高密度微放电阵列

• 批准号: 0319577
• 负责人: Marc Zemel
• 金额: $ 10万
• 依托单位: Anvik Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-07-01 至 2004-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0319577&HistoricalAwards=false
• 关键词: STTR; Phase; Fabrication; Large; Area

This Small Business Technology Transfer (STTR) Phase I project proposes to develop atechnique for the fabrication of large-area, high-density microdischarge arrays on flexible substrates. Microdischarge devices are a type of photonic emitter and detector in which a weakly ionized plasma is confined to spatial dimensions typically less than 200 microns. Microdischarge devices and arrays have the ability to operate continuously at atmospheric pressures with specific power loadings of the plasma of several tens of kW per cubic centimeter. In the proposed project, in order to evaluate the full potential of microdicharge devices for these applications they will be fabricated in higher densities on large, flexible substrates (as compared to the small arrays that have been previously demonstrated in the laboratory). Large-area processing techniques for deposition, patterning, gas filling, and lamination will be developed. In addition roll-to-roll processing techniques for the above mentioned steps, which is especially attractive for volume applications will be explored.Commercially, the development of a new technology to enable the fabrication of large-area, highdensity microdischarge arrays would enable the construction of a wide variety of devices, including flexible sheet light sources for numerous commercial applications including chemical sensors, microdisplays, and large area emission sources. Further, if the microdischarge pixels are made to be individually addressable, it will be possible to develop a flexible plasma display panel (PDP). Finally, through the use of roll-to-roll processing, such devices could be manufactured economically in high volumes. Such devices would be ideal for lighting applications where portability, conformability, ruggedness, and low cost are required.

本小企业技术转移（STTR）第一阶段项目提出了开发一种技术，用于制造大面积，高密度的微放电阵列上的柔性基板。微放电装置是一种光子发射器和检测器，其中弱电离等离子体被限制在通常小于200微米的空间尺寸。微放电装置和阵列具有在大气压下连续操作的能力，其中等离子体的特定功率负载为每立方厘米几十千瓦。在拟议的项目中，为了评估微充电设备在这些应用中的全部潜力，它们将在大型柔性基板上以更高的密度制造（与先前在实验室中展示的小型阵列相比）。将开发用于沉积、图案化、气体填充和层压的大面积处理技术。此外，将探索用于上述步骤的卷对卷处理技术，这对于批量应用特别有吸引力。在商业上，能够制造大面积、高密度微放电阵列的新技术的开发将能够构造各种各样的器件，包括用于许多商业应用的柔性片状光源，包括化学传感器、微显示器、和大面积排放源。此外，如果使微放电像素可单独寻址，则将有可能开发柔性等离子体显示面板（PDP）。最后，通过使用卷对卷加工，可以经济地大量制造这种装置。这种装置对于需要便携性、一致性、坚固性和低成本的照明应用是理想的。