GOALI: Chemical Factors Affecting Lifetime and Delivery of Metal-Organic Chemical Vapor Deposition Precursors: Exploring Gas and Liquid Phase Oligomerization, Decomposition, and Co

目标：影响金属有机化学气相沉积前驱体寿命和输送的化学因素：探索气相和液相低聚、分解和共聚

• 批准号: 0415928
• 负责人: John Belot
• 金额: --
• 依托单位: University of Nebraska-Lincoln
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-15 至 2008-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0415928&HistoricalAwards=false
• 关键词: GOALI; Chemical; Factors; Affecting; Lifetime

Professor John A. Belot of the University of Nebraska Chemistry Department has submitted a new GOALI proposal for research aimed at exploring and determining oligomerization, decomposition, and contamination issues affecting the lifetime and delivery characteristics of volatile MOCVD and ALD precursors for metal oxide thin films. This proposal involves collaboration between the University of Nebraska - Lincoln and Air Liquide. Ultimately, the PI's research will attempt to preclude deleterious reactivity by introducing trace stabilizing additives. Precursor stability is a critical factor which impacts manufacturability and is decisive in determining adoption of precursors for thin film growth of metal oxides by semiconductor manufacturers. The PI will study the inorganic chemistry of trace hydrolysis, aging, and concentration in select titanium, hafnium, and lanthanide homoleptic amino- and alkoxides, with the aim of improving the manufacturability and therefore the adoption of stable precursors for the deposition of oxide thin films. Undergraduate and graduate students will be exposed to real world problems and internship opportunities in a forefront research program in inorganic materials chemistry.

John A.内布拉斯加大学化学系的Belot提交了一份新的GOALI研究提案，旨在探索和确定影响金属氧化物薄膜挥发性MOCVD和ALD前体寿命和交付特性的低聚、分解和污染问题。 该提案涉及内布拉斯加大学林肯分校和液化空气公司之间的合作。 最终，PI的研究将试图通过引入微量稳定添加剂来消除有害反应。前体稳定性是影响可制造性的关键因素，并且在决定半导体制造商采用用于金属氧化物薄膜生长的前体方面是决定性的。 PI将研究选择钛，铪和镧系元素均配氨基和醇盐的微量水解，老化和浓缩的无机化学，目的是提高可制造性，从而采用稳定的前体沉积氧化物薄膜。 本科生和研究生将接触到真实的世界问题和实习机会在无机材料化学前沿研究计划。