MRI: Acquisition of ICP system within Two Universities/One Campus Framework

MRI：在两所大学/一所校园框架内购置ICP系统

• 批准号: 0420645
• 负责人: Gennady Friedman
• 金额: $ 30万
• 依托单位: Drexel University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-15 至 2006-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0420645&HistoricalAwards=false
• 关键词: MRI; Acquisition; ICP; system; within

The objective of this research to develop at Drexel University the capability of etching of high aspect ratio micro- and nanostructures in various polymers, silicon, and glass by acquiring an Inductively Coupled Plasma (ICP) etcher system. The development of such capabilities will benefit several nanotechnology projects at Drexel University and at the University of Pennsylvania. These projects include 3 NSF sponsored NIRTs on programmable assembly of nanocomponents and on carbon nanotube based nanofluidics. It will also benefit research on novel liquid crystal devices and soft condensed matter. It will be highly instrumental in NSF sponsored research on effects of surface morphology on cellular adhesion.The addition of the proposed ICP etching capability at Drexel will have a broad impact. No similar tool is available in the Philadelphia region and the proposed ICP system will be available to academic institutions and corporations in the entire Philadelphia region and beyond. Drexel University and the University of Pennsylvania are within one city block from each other and effectively form one contiguous university campus. The proposed ICP system will be part of a network of equipment for nanotechnology research and education being established within the two universities/one campus framework. It will directly benefit the NSF IGERT project to establish nanotechnology education within this framework. Drexel University and Penn are located in an urban school district and reaches many underprivileged students through effective outreach programs. Advanced instrumentation such as the proposed ICP system helps increase exposure of traditionally underrepresented groups to exciting advanced technologies.

这项研究的目标是在德雷塞尔大学通过获得电感耦合等离子体（ICP）蚀刻系统，发展在各种聚合物、硅和玻璃上蚀刻高纵横比微纳米结构的能力。这种能力的发展将使德雷塞尔大学和宾夕法尼亚大学的几个纳米技术项目受益。这些项目包括3个NSF资助的纳米组件可编程组装和基于碳纳米管的纳米流体的nirt。这也将有利于新型液晶器件和软凝聚态物质的研究。这将对美国国家科学基金会赞助的表面形态对细胞粘附的影响的研究有很大的帮助。Drexel公司拟议的ICP蚀刻能力的增加将产生广泛的影响。费城地区没有类似的工具，提议的ICP系统将适用于整个费城地区及其他地区的学术机构和企业。德雷塞尔大学和宾夕法尼亚大学在一个城市街区内，有效地形成了一个连续的大学校园。拟议的ICP系统将成为两所大学/一个校园框架内正在建立的纳米技术研究和教育设备网络的一部分。它将直接有利于NSF IGERT项目在这个框架内建立纳米技术教育。德雷塞尔大学和宾夕法尼亚大学位于城市学区，通过有效的外展项目接触到许多贫困学生。诸如提议的ICP系统等先进仪器有助于增加传统上代表性不足的群体接触令人兴奋的先进技术。