MRI: Acquisition of ICP system within Two Universities/One Campus Framework

这项研究的目标是在德雷克塞尔大学开发在各种聚合物、硅和玻璃上刻蚀高深宽比微米和纳米结构的能力，通过获得感应耦合等离子体(ICP)刻蚀系统来实现。这种能力的发展将使德雷克塞尔大学和宾夕法尼亚大学的几个纳米技术项目受益。这些项目包括3个由NSF赞助的关于纳米元件的可编程组装和关于基于碳纳米管的纳米流体的NIRT。这也将有助于新型液晶器件和软凝聚体的研究。它将在美国国家科学基金会赞助的表面形态对细胞黏附影响的研究中发挥重要作用。Drexel拟议的电感耦合等离子体刻蚀能力的增加将产生广泛的影响。费城地区没有类似的工具，整个费城地区和其他地区的学术机构和公司将可以使用拟议的比较方案系统。德雷克塞尔大学和宾夕法尼亚大学在一个城市街区内，有效地形成了一个毗连的大学校园。拟议的比较方案系统将是在两所大学/一个校园框架内建立的纳米技术研究和教育设备网络的一部分。在这一框架内建立纳米技术教育将直接使NSF IGERT项目受益。德雷克塞尔大学和宾夕法尼亚州立大学位于城市学区，通过有效的外展计划接触到许多贫困学生。拟议的比较方案系统等先进手段有助于增加传统上代表性不足的群体接触令人兴奋的先进技术的机会。

The objective of this research to develop at Drexel University the capability of etching of high aspect ratio micro- and nanostructures in various polymers, silicon, and glass by acquiring an Inductively Coupled Plasma (ICP) etcher system. The development of such capabilities will benefit several nanotechnology projects at Drexel University and at the University of Pennsylvania. These projects include 3 NSF sponsored NIRTs on programmable assembly of nanocomponents and on carbon nanotube based nanofluidics. It will also benefit research on novel liquid crystal devices and soft condensed matter. It will be highly instrumental in NSF sponsored research on effects of surface morphology on cellular adhesion.The addition of the proposed ICP etching capability at Drexel will have a broad impact. No similar tool is available in the Philadelphia region and the proposed ICP system will be available to academic institutions and corporations in the entire Philadelphia region and beyond. Drexel University and the University of Pennsylvania are within one city block from each other and effectively form one contiguous university campus. The proposed ICP system will be part of a network of equipment for nanotechnology research and education being established within the two universities/one campus framework. It will directly benefit the NSF IGERT project to establish nanotechnology education within this framework. Drexel University and Penn are located in an urban school district and reaches many underprivileged students through effective outreach programs. Advanced instrumentation such as the proposed ICP system helps increase exposure of traditionally underrepresented groups to exciting advanced technologies.