Interdepartmental Joint Development of Hands-On MEMS Using Semi-Custom Design Flow

工程-机械（59）本项目与机械工程、电气工程和材料工程部门合作，开发一门微机电系统（MEMS）的本科生动手实验课程。该项目正在研究限制MEMS跨学科学习进展的两个关键障碍：(1)不同部门专业的先决条件背景不兼容；(2)设备、成本、时间和人员专业知识方面的高开销。克服这些障碍的方法侧重于通过使用半定制设计流程和中等分辨率掩模技术来降低成本和设备障碍，以提高开放式学生学习过程的可负担性和实践性。结果和活动包括：1)通过明确先决条件而不是仅仅列出课程来降低障碍；2)借鉴其他机构的MEMS最佳实践；3)总结学生的贡献；4)对项目目标进展情况进行书面评估，并将评估结果提交工程学院课程委员会；5)通过工程教育刊物宣传项目成果；6)开发MEMS模块，支持机构在实践微工程方面的推广计划；7)开发可共享的部分标准化掩模套装和工艺配方数字库；8)制定书面计划，持续评估和持续改进他们的MEMS实验室课程，工艺能力以及这将如何有助于研究和独立学习，9)将项目结果制度化。该项目旨在让学生合作并评估他们的表现，以(1)为学生学习的有效性提供反馈，(2)确定如何降低对未来对MEMS感兴趣的学生的人为进入门槛，(3)增强实验室活动的流程和技术成果，以及(4)创造一个具有挑战性的跨学科环境。领导团队正在与他们强大的微电子工业支持网络合作。

Engineering-Mechanical (59) This project is developing an undergraduate hands-on laboratory course in microelectromechanical systems (MEMS) in collaboration with mechanical engineering, electrical engineering, and materials engineering departments. The project is investigating two critical barriers that limit advancement of interdisciplinary learning in MEMS: (1) incompatible prerequisite background from differing departmental majors and (2) high overhead in terms of facilities, cost, time, and personnel expertise. The method to overcome those barriers focuses on reducing the cost and equipment barrier by using semi-custom design flow and medium-resolution mask technology to increase the affordability and practice of open-ended student learning processes.Outcomes and activities include: 1) Lowering obstacles by articulating pre-requisites as opposed to mere course listings; 2) Adapting MEMS best practices from other institutions; 3) Developing a summary of student contributions; 4) Providing a written evaluation of the progress toward project goals and submitting the results to College of Engineering curriculum committee; 5) Disseminating the results of the project through engineering education publications; 6) Developing MEMS modules that will support the institutions outreach program in hands-on microengineering; 7) Developing a shareable digital library of partially standardized mask sets and process recipes; 8) Developing a written plan for on ongoing assessment and continual improvement of their MEMS laboratory course, process capabilities and how this would contribute to research and independent study, and 9) Institutionalizing results of the project. The project is engaging students collaboratively and evaluating their performance to (1) provide feedback on the effectiveness of student learning, (2) determine how to lower artificial barrier-to-entry for future students interested in MEMS, (3) enhance the flow and technical outcomes of laboratory activities, and (4) create a challenging interdisciplinary environment. The leadership team is collaborating with their strong microelectronics industrial support network.