Millimeterwave radar sensor for high accuracy position measurement in small machine tools

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In the first project period of the SPP1476 project micrometer accuracy in range respectively position detection in micro machine tools was achieved using the radar principle. In the field of radar sensors with this accuracy a record is established. The goal of the proposed project is to develop a radar sensor, which provides ad-hoc integration in different applications. Therefore real-time, highly accurate, small radar-modules which can be easily integrated in different measurement settings are provided to participating project partners. The project partners obtain the possibility to test the radar sensor in their modules and on the other hand the experience of the project partners can be used to optimize the radar sensor.During the further course of the project, radar measurement are systematically investigated for their limits and improved for high-accuracy measurements and improved. Thus, the high-frequency radar circuits for signal generation and the receiver on SiGe chips, as well as their phase stabilization are improved. Additionally, the packaging of the chips, antennas, signal processing algorithms and the ability to integrate into machine tools are refined.The miniaturization of the machine tools and the high frequencies used for the radar result in high demands on the high frequency engineering. Thus a goal of this project is to investigate the measurement environment to carry out measurements close to the tool center point in a machine tool. Two basic radar approaches are considered, measurements in free space, which is always influenced by numerous disturbing multiple reflections of the metallic environment, and guided measurements in a waveguide. In both environments, the wave propagation conditions are examined as part of a work package in terms of mismatches and multiple reflections by using optimized antennas and appropriate radar targets.Since the resolution and thus the achievable accuracy of radar measurements is basically limited by the frequency, bandwidth and phase stability, these three limiting factors are enhanced by various approaches on chip level in three work packages. The aimed-at frequencies beyond 100 GHz with a bandwidth of 50 GHz are beyond the state of the art. This results also in new requirements for the packaging of the chips and the feeding of the antenna, as well as the focusing by a dielectric lens. The related problems are treated as part of another work package.Through the solutions developed within the project, it must be assumed that the achieved measurement accuracy can be further increased into the submicrometer range.